用于观测空气退火过程中光学薄膜变化的成像散射仪
仪器与探测器
2022-02-28 v1
摘要
空气退火通常会降低非晶薄膜中的吸收、散射和机械损耗，直至发生损伤的温度为止。我们的仪器使用一个带观察窗的工业烘箱，以在退火过程中观测薄膜散射与损伤。
引用
@article{arxiv.2202.12393,
title = {Imaging Scatterometer for Observing Changes to Optical Coatings During Air Annealing},
author = {Michael Rezac and Daniel Martinez and Amy Gleckl and Joshua R. Smith},
journal= {arXiv preprint arXiv:2202.12393},
year = {2022}
}
备注
Submission for Optica Conference: Optical Interference Coatings 2022