基于色散共焦显微术的新型单次全视场表面轮廓仪研制
光学
2019-04-24 v2 应用物理
摘要
研制了一种基于衍射色散共焦显微术和面阵光谱传感的新颖全视场表面轮廓仪。开发了归一化互相关算法以建立光谱-深度响应曲线。单个表面深度的测量重复性可控制在 120 纳米以内。
引用
@article{arxiv.1812.06578,
title = {Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy},
author = {Duc Trung Nguyen and Liang-Chia Chen},
journal= {arXiv preprint arXiv:1812.06578},
year = {2019}
}
备注
Conflict of interest between co-authors