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We report the fabrication and electrical characterization of a single electron transistor in a modulation doped silicon/silicon-germanium heterostructure. The quantum dot is fabricated by electron beam lithography and subsequent reactive…

We report on the fabrication and characterization of quantum dot devices in a Schottky-gated silicon/silicon-germanium two-dimensional electron gas (2DEG). The dots are confined laterally inside an etch-defined channel, while their…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 K A Slinker , K L M Lewis , C C Haselby , S Goswami , L J Klein , J O Chu , S N Coppersmith , Robert Joynt , R H Blick , Mark Friesen , M A Eriksson

A new fabrication technique is used to produce quantum dots with read-out channels in silicon/silicon-germanium two-dimensional electron gases. The technique utilizes Schottky gates, placed on the sides of a shallow etched quantum dot, to…

Mesoscale and Nanoscale Physics · Physics 2009-11-11 M. R. Sakr , E. Yablonovitch , E. T. Croke , H. W. Jiang

A single hole transistor is patterned in a p-Si/SiGe quantum well by applying voltages to nanostructured top gate electrodes. Gating is achieved by oxidizing the etched semiconductor surface and the mesa walls before evaporation of the top…

Mesoscale and Nanoscale Physics · Physics 2009-10-31 U. Doetsch , U. Gennser , T. Heinzel , S. Luescher , C. David , G. Dehlinger , D. Gruetzmacher , K. Ensslin

A single-electron transistor has been realized in a Ga[Al]As heterostructure by oxidizing lines in the GaAs cap layer with an atomic force microscope. The oxide lines define the boundaries of the quantum dot, the in-plane gate electrodes,…

Mesoscale and Nanoscale Physics · Physics 2009-10-31 S. Luescher , A. Fuhrer , R. Held , T. Heinzel , K. Ensslin , W. Wegscheider

We report on single-electron shuttling experiments with a silicon metal-oxide-semiconductor quantum dot at 300 mK. Our system consists of an accumulated electron layer at the Si/SiO_2 interface below an aluminum top gate with two additional…

Quantum Physics · Physics 2015-03-19 K. W. Chan , M. Mottonen , A. Kemppinen , N. S. Lai , K. Y. Tan , W. H. Lim , A. S. Dzurak

We employ density functional theory to calculate the self consistent electronic structure, free energy and linear source-drain conductance of a lateral semiconductor quantum dot patterned via surface gates on the 2DEG formed at the…

Condensed Matter · Physics 2009-10-28 M. Stopa

Enhancement-mode Si/SiGe electron quantum dots have been pursued extensively by many groups for \revEdit{their} potential in quantum computing. Most of the reported dot designs utilize multiple metal-gate layers and use Si/SiGe…

Mesoscale and Nanoscale Physics · Physics 2016-09-21 T. M. Lu , J. K. Gamble , R. P. Muller , E. Nielsen , D. Bethke , G. A. Ten Eyck , T. Pluym , J. R. Wendt , J. Dominguez , M. P. Lilly , M. S. Carroll , M. C. Wanke

Transport measurements at cryogenic temperatures through a few electron top gated quantum dot fabricated in a silicon/silicon-germanium heterostructure are reported. Variations in gate voltage induce a transition from an isolated dot toward…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 Levente J. Klein , Donald E. Savage , Mark A. Eriksson

In this letter we report single-hole tunneling through a quantum dot in a two-dimensional hole gas, situated in a narrow-channel field-effect transistor in intrinsic silicon. Two layers of aluminum gate electrodes are defined on Si/SiO$_2$…

Mesoscale and Nanoscale Physics · Physics 2013-05-16 P. C. Spruijtenburg , J. Ridderbos , F. Mueller , A. W. Leenstra , M. Brauns , A. A. I. Aarnink , W. G. van der Wiel , F. A. Zwanenburg

We introduce a silicon metal-oxide-semiconductor quantum dot architecture based on a single polysilicon gate stack. The elementary structure consists of two enhancement gates separated spatially by a gap, one gate forming a reservoir and…

Mesoscale and Nanoscale Physics · Physics 2019-03-07 S. Rochette , M. Rudolph , A. -M. Roy , M. Curry , G. Ten Eyck , R. Manginell , J. Wendt , T. Pluym , S. M. Carr , D. Ward , M. P. Lilly , M. S. Carroll , M. Pioro-Ladrière

Transistors, regardless of their size, rely on electrical gates to control the conductance between source and drain contacts. In atomic-scale transistors, this conductance is exquisitely sensitive to single electrons hopping via individual…

A simple and highly reproducible single electron transistor (SET) has been fabricated using gated silicon nanowires. The structure is a metal-oxide-semiconductor field-effect transistor made on silicon-on-insulator thin films. The channel…

Mesoscale and Nanoscale Physics · Physics 2009-11-11 M. Hofheinz , X. Jehl , M. Sanquer , G. Molas , M. Vinet , S. Deleonibus

A few-electron double quantum dot was fabricated using metal-oxide-semiconductor(MOS)-compatible technology and low-temperature transport measurements were performed to study the energy spectrum of the device. The double dot structure is…

Mesoscale and Nanoscale Physics · Physics 2009-04-28 W. H. Lim , H. Huebl , L. H. Willems van Beveren , S. Rubanov , P. G. Spizzirri , S. J. Angus , R. G. Clark , A. S. Dzurak

We report on low-temperature electronic transport measurements of a silicon metal-oxide-semiconductor quantum dot, with independent gate control of electron densities in the leads and the quantum dot island. This architecture allows the dot…

Mesoscale and Nanoscale Physics · Physics 2015-05-14 W. H. Lim , F. A. Zwanenburg , H. Huebl , M. Mottonen , K. W. Chan , A. Morello , A. S. Dzurak

We report a robust process for fabrication of surface-gated Si/SiGe quantum dots (QDs) with an integrated superconducting single-electron transistor (S-SET) charge sensor. A combination of a deep mesa etch and AlOx backfill is used to…

Mesoscale and Nanoscale Physics · Physics 2011-04-08 Mingyun Yuan , Feng Pan , Zhen Yang , T. J. Gilheart , Fei Chen , D. E. Savage , M. G. Lagally , M. A. Eriksson , A. J. Rimberg

We present measurements of silicon (Si) metal-oxide-semiconductor (MOS) nanostructures that are fabricated using a process that facilitates essentially arbitrary gate geometries. Stable Coulomb blockade behavior free from the effects of…

We demonstrate a reconfigurable quantum dot gate architecture that incorporates two interchangeable transport channels. One channel is used to form quantum dots and the other is used for charge sensing. The quantum dot transport channel can…

Mesoscale and Nanoscale Physics · Physics 2015-06-29 D. M. Zajac , T. M. Hazard , X. Mi , K. Wang , J. R. Petta

We propose and demonstrate a relaxed-SiGe/strained-Si (SiGe/s-Si) enhancement-mode gate stack for quantum dots. The enhancement-mode SiGe/s-Si structure is pursued because it spaces the quantum dot away from charge and spin defect rich…

Mesoscale and Nanoscale Physics · Physics 2011-07-28 T. M. Lu , N. C. Bishop , T. Pluym , J. Means , P. G. Kotula , J. Cederberg , L. A. Tracy , J. Dominguez , M. P. Lilly , M. S. Carroll

We incorporate an Al-AlO_x-Al single-electron transistor as the gate of a narrow (~100 nm) metal-oxide-semiconductor field-effect transistor (MOSFET). Near the MOSFET channel conductance threshold, we observe oscillations in the conductance…

Mesoscale and Nanoscale Physics · Physics 2011-11-10 L. Sun , K. R. Brown , B. E. Kane
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