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Monolithic pixel sensors for charged particle detection and imaging applications have been designed and fabricated using commercially available, deep-submicron Silicon-On-Insulator (SOI) processes, which insulate a thin layer of integrated…

Instrumentation and Detectors · Physics 2009-05-08 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Lindsay Glesener , Serena Mattiazzo , Chinh Qu Vu

This paper presents the results of the characterisation of a pixel sensor manufactured in OKI 0.2 micron SOI technology integrated on a high-resistivity substrate, and featuring several pixel cell layouts for charge collection optimisation.…

Instrumentation and Detectors · Physics 2011-10-19 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Serena Mattiazzo , Devis Pantano , Sarah Zalusky

This paper presents the design and test results of a prototype monolithic pixel sensor manufactured in deep-submicron fully-depleted Silicon-On-Insulator (SOI) CMOS technology. In the SOI technology, a thin layer of integrated electronics…

Instrumentation and Detectors · Physics 2009-06-23 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Lindsay Glesener , Serena Mattiazzo , Chinh Vu

A monolithic pixel sensor in deep-submicron Silicon-On-Insulator (SOI) CMOS technology has been designed, manufactured and characterised. This technology is of significant interest for applications in particle tracking and imaging. The…

Instrumentation and Detectors · Physics 2008-07-02 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Lindsay E. Glesener , Serena Mattiazzo , Chinh Vu

This paper presents the results of the characterisation of a thin, fully depleted pixel sensor manufactured in SOI technology on high-resistivity substrate with high momentum charged particles. The sensor is thinned to 70 $\mu$m and a thin…

Instrumentation and Detectors · Physics 2012-02-17 Marco Battaglia , Dario Bisello , Devis Contarato , Peter Denes , Piero Giubilato , Serena Mattiazzo , Devis Pantano

The experiment of the future electron-positron colliders has unprecedented requirements on the vertex resolution, such as around 3micron single point resolution for the inner most detector layer, with fast readout, and very low…

Instrumentation and Detectors · Physics 2021-04-13 Jing Dong , Yunpeng Lu , Zhigang Wu , Yang Zhou , Qun Ouyang

We have been developing monolithic active pixel sensors for X-rays based on the silicon-on-insulator technology. Our device consists of a low-resistivity Si layer for readout CMOS electronics, a high-resistivity Si sensor layer, and a…

This paper presents the design of a new monolithic Silicon-On-Insulator pixel sensor in $200~nm$ SOI CMOS technology. The main application of the proposed pixel detector is the spectroscopy, but it can also be used for the minimum ionizing…

Instrumentation and Detectors · Physics 2015-07-06 Szymon Bugiel , Roma Dasgupta , Sebastian Glab , Marek Idzik , Jakub Moron , Piotr Julian Kapusta , Wojciech Kucewicz , Michal Turala

In this paper, we describe the development of monolithic pixel detectors by using a Silicon-on-Insulator (SOI) technology for X-ray and charged particle applications. The detectors are based on a 0.2 {\mu}m CMOS fully depleted SOI process…

Instrumentation and Detectors · Physics 2019-11-14 S. Mitsui , Y. Arai , T. Miyoshi , A. Takeda

We have been developing monolithic active pixel sensors, known as Kyoto's X-ray SOIPIXs, based on the CMOS SOI (silicon-on-insulator) technology for next-generation X-ray astronomy satellites. The event trigger output function implemented…

This paper reports results on a detailed study of charge collection and signal-to-noise performance of CMOS monolithic pixel sensors before and after back-thinning and their application in a pixel beam telescope for the ALS 1.5 GeV $e^-$…

Instrumentation and Detectors · Physics 2008-11-26 Marco Battaglia , Devis Contarato , Piero Giubilato , Leo Greiner , Lindsay Glesener , Benjamin Hooberman

We have been developing a monolithic active pixel sensor, ``XRPIX``, for the Japan led future X-ray astronomy mission ``FORCE`` observing the X-ray sky in the energy band of 1-80 keV with angular resolution of better than 15``. XRPIX is an…

Analogue test structures were fabricated using the Tower Partners Semiconductor Co. CMOS 65 nm ISC process. The purpose was to characterise and qualify this process and to optimise the sensor for the next generation of Monolithic Active…

Instrumentation and Detectors · Physics 2024-03-15 Gianluca Aglieri Rinella , Giacomo Alocco , Matias Antonelli , Roberto Baccomi , Stefania Maria Beole , Mihail Bogdan Blidaru , Bent Benedikt Buttwill , Eric Buschmann , Paolo Camerini , Francesca Carnesecchi , Marielle Chartier , Yongjun Choi , Manuel Colocci , Giacomo Contin , Dominik Dannheim , Daniele De Gruttola , Manuel Del Rio Viera , Andrea Dubla , Antonello di Mauro , Maurice Calvin Donner , Gregor Hieronymus Eberwein , Jan Egger , Laura Fabbietti , Finn Feindt , Kunal Gautam , Roman Gernhaeuser , James Julian Glover , Laura Gonella , Karl Gran Grodaas , Ingrid-Maria Gregor , Hartmut Hillemanns , Lennart Huth , Armin Ilg , Artem Isakov , Daniel Matthew Jones , Antoine Junique , Jetnipit Kaewjai , Markus Keil , Jiyoung Kim , Alex Kluge , Chinorat Kobdaj , Artem Kotliarov , Kritsada Kittimanapun , Filip Křížek , Gabriela Kucharska , Svetlana Kushpil , Paola La Rocca , Natthawut Laojamnongwong , Lukas Lautner , Roy Crawford Lemmon , Corentin Lemoine , Long Li , Francesco Librizzi , Jian Liu , Anna Macchiolo , Magnus Mager , Davide Marras , Paolo Martinengo , Silvia Masciocchi , Serena Mattiazzo , Marius Wilm Menzel , Alice Mulliri , Mia Rose Mylne , Francesco Piro , Alexandre Rachevski , Marika Rasà , Karoliina Rebane , Felix Reidt , Riccardo Ricci , Sara Ruiz Daza , Gaspare Saccà , Isabella Sanna , Valerio Sarritzu , Judith Schlaadt , David Schledewitz , Gilda Scioli , Serhiy Senyukov , Adriana Simancas , Walter Snoeys , Simon Spannagel , Miljenko Šuljić , Alessandro Sturniolo , Nicolas Tiltmann , Antonio Trifirò , Gianluca Usai , Tomas Vanat , Jacob Bastiaan Van Beelen , Laszlo Varga , Michele Verdoglia , Gianpiero Vignola , Anna Villani , Haakan Wennloef , Jonathan Witte , Rebekka Bettina Wittwer

0.2 um fully-depleted SOI technology has been developed a for X-ray pixel detectors. To improve the detector performance, some advanced process technologies are developing continuously. To utilize the high resistivity FZ-SOI, slow ramp up…

Instrumentation and Detectors · Physics 2015-11-18 Masao Okihara , Hiroki Kasai , Noriyuki Miura , Naoya Kuriyama , Yoshiki Nagatomo

This paper presents the results of the characterisation of a back-illuminated pixel sensor manufactured in Silicon-On-Insulator technology on a high-resistivity substrate with soft X-rays. The sensor is thinned and a thin Phosphor layer…

Instrumentation and Detectors · Physics 2015-06-03 Marco Battaglia , Dario Bisello , Richard Celestre , Devis Contarato , Peter Denes , Serena Mattiazzo , Craig Tindall

SOI (Silicon-On-Insulator) pixel sensor is promising technology for developing the high position resolution detector by integrating the small pixels and circuits in the monolithic way. The event driven (trigger mode) SOI based pixel sensor…

A silicon pixel detector with fine pitch size of 19x19 um, developed base on SOI (silicon on insulator) technology, was tested under the illumination of infrared laser pulses. As an alternative way to particle beam tests, the laser pulses…

Instrumentation and Detectors · Physics 2016-08-03 Yi Liu , Yunpeng Lu , Xudong Ju , Qun Ouyang

We developed a beam telescope system comprising five layers of 300-$\mu$m-thick INTPIX4NA monolithic pixel sensors with each pixel size of 17 $\mu$m square. The sensors were fabricated using silicon-on-insulator (SOI) technology. The…

Instrumentation and Detectors · Physics 2022-08-24 Hisanori Suzuki , Takumi Omori , Kazuhiko Hara , Hiroki Yamauchi , Miho Yamada , Toru Tsuboyama , Ayaki Takeda

CMOS Monolithic Active Pixel Sensors (CPS) are ultra-light and highly granular silicon pixel detectors suited for highly sensitive charged particle tracking. Being manufactured with cost efficient standard CMOS processes, CPS may integrate…

Instrumentation and Detectors · Physics 2020-01-29 M. Deveaux

Within the ATTRACT FASTPIX project, a monolithic pixel sensor demonstrator chip has been developed in a modified 180 nm CMOS imaging process technology, targeting sub-nanosecond timing precision for single ionising particles. It features a…

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