相关论文: Membrane phononic crystals for high-Qm mechanical …
Lithium niobate (LN) exhibits unique material characteristics that have found many important applications. Scaling LN devices down to a nanoscopic scale can dramatically enhance light-matter interaction that would enable nonlinear and…
Photonic miniaturization requires seamless integration of linear and nonlinear optical components to achieve passive and active functions simultaneously. Among the available material systems, silicon photonics holds immense promise for…
This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated…
Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of…
We present a monolithic integrated aluminum nitride (AlN) optomechanical resonator in which the mechanical motion is actuated by piezoelectric force and the displacement is transduced by a high-Q optical cavity. The AlN optomechanical…
Optomechanical crystals are a promising device platform for quantum transduction and sensing. Precise targeting of the optical and acoustic resonance frequencies of these devices is crucial for future advances on these fronts. However,…
We report the design, fabrication, and characterization of diamond cantilevers attached to a phononic square lattice. We show that the robust protection of mechanical modes by phononic band gaps leads to a three-orders-of-magnitude increase…
We present a new approach to dielectric metasurface design that relies on a single resonator per unit cell and produces robust, high quality-factor Fano resonances. Our approach utilizes symmetry breaking of highly symmetric resonator…
Phononic Crystals provide a versatile platform for controlling phonons in applications such as waveguiding, filtering, and sensing. To minimize dissipation, cavity resonators are often embedded within the bandgap of phononic crystals and…
Development of low-loss photonic components in the ultraviolet (UV) band will open new prospects for classical and quantum optics. Compared with other integrated platforms, aluminum nitride (AlN) is particularly attractive as it features an…
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality factor (Q) of 208, resulting in a figure of merit (FoM, Qk2)…
Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The…
We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical…
Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle…
A versatile system to construct polymeric phononic crystals by using ultrasound is described. In order to fabricate this material a customised cavity device fitted with a 2 MHz acoustic transducer and an acoustic reflector is employed for…
Low-dimensional plasmonic materials can function as high quality terahertz and infrared antennas at deep subwavelength scales. Despite these antennas' strong coupling to electromagnetic fields, there is a pressing need to further strengthen…
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum…
The monolithic integration of electromechanical transduction at the nanoscale with advanced CMOS is among the most important challenges of semiconductor electronic systems to leverage the multi-domain sensing, actuation, and resonance…
Plasmon resonance in metals represents the collective oscillation of the free electron gas density and enables enhanced light-matter interactions in nanoscale dimensions. Traditionally, the classical Drude model describes the plasmonic…
Recent years have witnessed the boom of cavity optomechanics, which exploits the confinement and coupling of optical and mechanical waves at the nanoscale. Amongst their physical implementations, optomechanical (OM) crystals built on…