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We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the…
We report on a flow sensing approach based on deflection monitoring of micro beams buckled by the compressive thermal stress due to electrothermal Joules heating. The air stream convectively cooling the device affects both the critical…
We report on the piezoresistive method for detecting stability loss events in microelectromechanical (MEMS) sensors based on bifurcation. The method involves measuring the resistivity changes of an entire beam to detect snap-through…
We study the dynamics of MEMS microbeams undergoing electrostatic pull-in. At DC voltages close to the pull-in voltage, experiments and numerical simulations have reported `bottleneck' behaviour in which the transient dynamics slow down…
Micro-electro mechanical systems (MEMS) thermal flow sensors are increasingly used for compact, low-power flow monitoring in biomedical applications. However, silicon-based method for sensor fabrication is limited by high cost, rigidity,…
Scanning Electron Microscopy (SEM) experiments provide detailed insights into material microstructures, enabling high-resolution imaging as well as crystallographic analysis through advanced techniques like Electron Backscatter Diffraction…
Heat flux sensors have potential in enabling applications that require tracking of direct and instantaneous thermal energy transfer. To facilitate their use, the sensors have to be robust and feasible to implement, while maintaining high…
The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers,…
Energy dissipation is an unavoidable phenomenon of physical systems that are directly coupled to an external environmental bath. The ability to engineer the processes responsible for dissipation and coupling is fundamental to manipulate the…
Recently, we demonstrated that the local heating of degassed water can generate water vapor microbubbles and induce a rapid flow around the bubble. Although flow generation involves the self-excited oscillation of bubbles at a local heating…
Understanding microstructural evolution under extreme thermal conditions is essential for advancing metal additive manufacturing (AM). This work demonstrates the feasibility of employing micro-electro-mechanical system (MEMS) heating…
Microfluidics technology offers high efficiency of heat and mass transfer and low safety hazards compared to conventional multiphase processes. The multiphase flow in the microchannels is usually characterized as Taylor flow that includes…
Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability…
We report highly sensitive specific heat measurement on mesoscopic superconducting loops at low temperature. These mesoscopic systems exhibit thermal properties significantly different from that of the bulk materials. The measurement is…
In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams…
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with…
Due to the rapid growth in demand for power for sensing devices located in remote locations, scientists' attention has been drawn to vibration energy harvesting as an alternative to batteries. As a result of over two decades of micro-scale…
High-temperature superconducting (HTS) Flux pumps are promising devices to maintain steady current mode in HTS magnets or to energize rotor windings in motors and generators in a contactless way. Among different types of flux pumps, the…
Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…