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Following requirements of the plasma processing industry for increasing throughput, capacitively coupled plasma reactors with large area electrodes driving by very high frequency sources have been proposed. However, such reactors with…
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conserving implicit fully electromagnetic particle-in-cell / Monte…
A self-consistent particle-in-cell simulation study is performed to investigate the effect of driving frequency on the electric field non-linearity, electron heating mechanism and electron energy distribution function (EEDF) in a low…
We report the existence of an enhanced operating regime for a high-frequency, low-pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic field applied parallel to the electrodes. Our PIC-MCC simulations show…
The system made by a charged particle interacting with a single electrostatic wave which propagates perpendicularly to the magnetic field, at a frequency larger than the cyclotron one, has been extensively studied in literature due to its…
The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 $\leq$ $f_{ce}/f_{rf}$ $\lt$ 2, where $f_{ce}$ and $f_{rf}$ are the cyclotron and radio-frequencies (RF),…
Different electron acceleration regimes in the evanescent field of a surface plasma wave are studied by considering the interaction of a test electron with the high-frequency electromagnetic field of a surface wave. The non-relativistic and…
The electron residual energy originated from the stochastic heating in under-dense field-ionized plasma is here investigated. The optical response of plasma is initially modeled by using the concept of two counter-propagating…
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technological processes. One possible plasma-surface interaction is…
The dynamical characteristics of a single frequency low pressure capacitively coupled plasma (CCP) device under varying applied RF voltages and driving frequencies are studied using particle-in-cell/Monte Carlo collision simulations. An…
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very high frequency capacitively coupled plasma (CCP) excited by a…
The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by $1 \le f_{ce}/f_{rf} < 2$, where $f_{ce}$ and $f_{rf}$ denote the electron cyclotron frequency and the applied…
Recently, S Patil et al. have reported the existence of an enhanced operating regime when a low-pressure (5 mTorr) capacitively coupled discharge (CCP) is driven by a very high radio-frequency (60 MHz) source in the presence of a weak…
We perform extensive 2D Particle-In-Cell (PIC) electromagnetic simulations of low pressure Inductively Coupled Plasma (ICP) discharges with various coil current and driving frequencies. Our simulations show that in low-frequency cases,…
Generation of anomalously energetic suprathermal electrons was observed in simulation of a high- voltage dc discharge with electron emission from the cathode. An electron beam produced by the emission interacts with the nonuniform plasma in…
In this work, we analyze the creation of the discharge asymmetry and the concomitant formation of the DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms, as a function of the electrode…
Radiofrequency capacitively coupled plasma is studied theoretically using a Particle-in-Cell code. For He discharge, the time-averaged sheaths are in the range of few centimeters. The sheath potential, ion, and electron energy and angular…
Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simulations and semi-analytical modeling. A strong heating of…
Magnetic reconnection plays an important role in the release of magnetic energy and consequent energization of particles in collisionless plasmas. Energy transfer in collisionless magnetic reconnection is inherently a two-step process:…
An independent control of the flux and energy of ions impacting on an object immersed in a plasma is often desirable for many industrial processes such as microelectronics manufacturing. We demonstrate that a simultaneous control of these…