相关论文: Tunable MEMS VCSEL on Silicon substrate
All-dielectric metasurfaces consisting of arrays of nanostructured high-refractive-index materials, typically Si, are re-writing what is achievable in terms of the manipulation of light. Such devices support very strong magnetic, as well as…
This study demonstrates the realization of localized in-plane optomechanical microcavities embedded within an electrostatic MEMS architecture. The system consists of a curved, clamped-clamped microbeam, fabricated on a silicon-on-insulator…
A mechanism for additional enhancement of SERS in the nanoparticle-on-mirror scheme is proposed. This new mechanism is based on the use of a substrate made of material with a near-minus-one permittivity. The setup involves a plasmonic…
Flexible control of the modal confinement in silicon photonic waveguides is an appealing feature for many applications, including sensing and hybrid integration of active materials. In most cases, strip waveguides are the preferred solution…
Two-dimensional (2D) indium monoselenide (InSe) has attracted significant attention as a III-VI two-dimensional semiconductor (2D) with a combination of favorable attributes from III-V semiconductors as well as van der Waals 2D transition…
This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufactured on silicon substrate using the 0.35 micrometers CMOS…
We present a numerical study of a MEMS-based design of a fiber cavity integrated with an ion trap system. Each fiber mirror is supported by a microactuator that controls the mirror's position in three dimensions. The mechanical stability is…
Planar microcavities with distributed Bragg reflectors (DBRs) host, besides confined optical modes, also mechanical resonances due to stop bands in the phonon dispersion relation of the DBRs. These resonances have frequencies in the…
High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are…
Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate mechanical properties are important for successful…
We present a method to implement 3-dimensional polariton confinement with in-situ spectral tuning of the cavity mode. Our tunable microcavity is a hybrid system consisting of a bottom semiconductor distributed Bragg reflector (DBR) with a…
W centers are trigonal defects generated by self-ion implantation in silicon that exhibit photoluminescence at 1.218 $\mu$m. We have shown previously that they can be used in waveguide-integrated all-silicon light-emitting diodes (LEDs).…
A new generation of microfabricated MEMS for electron optics is changing electron microscopy for the better. These devices allow operations on the electron beam that are impossible with conventional electron optics. Unprecedented phase…
This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…
The tuning of electrical circuit resonance with a variable capacitor, or varactor, finds wide application with the most important being wireless telecommunication. We demonstrate an electromechanical graphene varactor, a variable capacitor…
Metalenses built up by artificial sub-wavelength nanostructures have shown the capability of realizing light focusing with miniature lens size. To date, most of the reported metalenses were patterned using electron beam lithography (EBL),…
A Scanning Tunneling Microscope (STM) is one of the most important scanning probe tools available to study and manipulate matter at the nanoscale. In a STM, a tip is scanned on top of a surface with a separation of a few \AA. Often, the…
The multimode waveguide bends (MWBs) with very compact sizes are the key building blocks in the applications of different mode-division multiplexing (MDM) systems. To further increase the transmission capacity, the silicon multimode…
We design and characterize phase-modulated, ultra-compact, silicon-based axilens devices that combine efficient point focusing and grating selectivity within scalable 4-level phase mask configurations. The proposed designs are polarization…
Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demand the capability to tune the optical…