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We designed and successfully fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a Niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is…

介观与纳米尺度物理 · 物理学 2013-10-08 Haijie Li , Yiwen Wang , Lianfu Wei , Pinjia Zhou , Qiang Wei , Chunhai Cao , Yurong Fang , Yang Yu , Peiheng Wu

We have designed, fabricated and characterized microwave resonators made out of thin films of granular aluminium (grAl) with different oxygen content. We extract the contribution of the large kinetic-inductance of this disordered…

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we…

We investigate thin films of conducting aluminium-oxide, also known as granular aluminium, as a material for superconducting high quality, high kinetic inductance circuits. The films are deposited by an optimised reactive DC magnetron…

As superconducting kinetic inductance detectors (KIDs) continue to grow in popularity for sensitive submillimeter detection and other applications, there is a drive to advance toward lower-loss devices. We present measurements of diagnostic…

Advancements in the fabrication of superconducting quantum devices have highlighted tantalum as a promising material, owing to its low surface oxidation microwave loss at low temperatures. However, tantalum films exhibit significantly…

量子物理 · 物理学 2024-05-07 Dengfeng Li , Jingjing Hu , Yuan Li , Shuoming An

Characterizing superconducting microwave resonators with highly dissipative elements is a technical challenge, but a requirement for implementing and understanding the operation of hybrid quantum devices involving dissipative elements, e.g.…

We demonstrate the operation of superconducting coplanar microwave resonators in a very large frequency range up to 50 GHz. The resonators are fabricated from niobium thin films on sapphire substrates and optimized for these high…

The geometric, kinetic, and total inductances and the attenuation constant are theoretically analyzed for a thin-film superconducting coplanar waveguide (CPW) resonator consisting of a current-carrying central conductor, adjacent slots, and…

超导电性 · 物理学 2015-06-11 John R. Clem

We have studied Nb lambda/2 coplanar-waveguide (CPW) resonators whose resonant frequencies are 10-11 GHz. The resonators have different film thicknesses, t=0.05, 0.1, 0.2, and 0.3 um. We measured at low temperatures, T=0.02-5 K, one of the…

超导电性 · 物理学 2009-11-25 Kunihiro Inomata , Tsuyoshi Yamamoto , Michio Watanabe , Kazuaki Matsuba , Jaw-Shen Tsai

This work focuses on the development and demonstration of tunable superconducting on-chip resonator, leveraging the intrinsic current-dependent non-linear kinetic inductance of superconducting aluminium, and investigating the effect of…

天体物理仪器与方法 · 物理学 2026-05-08 Patrick Ashworth , Peter S. Barry , Chris S. Benson , Harry Gordon-Moys , Izaak Morris

We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\,mm diameter high-resistivity Si(100) substrates. We systematically…

Superconducting coplanar waveguide (SCPW) resonators have a wide range of applications due to the combination of their planar geometry and high quality factors relative to normal metals. However, their performance is sensitive to both the…

We have designed superinductors made of strongly disordered superconductors for implementation in "hybrid" superconducting quantum circuits. The superinductors have been fabricated as meandered nanowires made of granular Aluminum films.…

介观与纳米尺度物理 · 物理学 2020-05-25 Plamen Kamenov , Wen-Sen Lu , Konstantin Kalashnikov , Thomas DiNapoli , Matthew T. Bell , Michael E. Gershenson

The loss in superconducting microwave resonators at low-photon number and low temperatures is not well understood but has implications for achievable coherence times in superconducting qubits. We have fabricated single-layer resonators with…

超导电性 · 物理学 2015-05-19 Moe S. Khalil , F. C. Wellstood , Kevin D. Osborn

We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high microwave powers and over 1 million at low powers, with the best low power results approaching 2…

We have designed and fabricated superconducting coplanar waveguide resonators with fundamental frequencies from 2 to $9 \rm{GHz}$ and loaded quality factors ranging from a few hundreds to a several hundred thousands reached at temperatures…

超导电性 · 物理学 2008-12-16 M. Göppl , A. Fragner , M. Baur , R. Bianchetti , S. Filipp , J. M. Fink , P. J. Leek , G. Puebla , L. Steffen , A. Wallraff

We present an experimental approach for cryogenic dielectric measurements on ultra-thin insulating films. Based on a coplanar microwave waveguide design we implement superconducting quarter-wave resonators with inductive coupling, which…

Superconducting microwave circuits based on coplanar waveguides (CPW) are susceptible to parasitic slotline modes which can lead to loss and decoherence. We motivate the use of superconducting airbridges as a reliable method for preventing…

We report on the characterization of microwave loss of thin aluminum oxide films at low temperatures using superconducting lumped resonators. The oxide films are fabricated using plasma oxidation of aluminum and have a thickness of 5 nm. We…

介观与纳米尺度物理 · 物理学 2014-02-24 Chunqing Deng , Martin Otto , Adrian Lupascu
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