基于边沉积与微波退火制造的芯内谐振器用于非线性动力感性电感表征及未来谱测应用
摘要
本工作聚焦于开发和实现一种可调谐的超导芯内谐振器，利用超导铝本身的电流依赖非线性动力感性电感，并探讨氧气含量的影响。薄膜采用标准金属蒸发工艺沉积。我们 presenting results from a comprehensive study based on a series of evaporated Al thin films. This research aims to inform and constrain optimisation strategies for the design of mm-wave on-chip spectrometers, particularly regarding yield, resolution, and efficiency. By systematically varying film stoichiometry, we use a series of DC measurements to extract fundamental film properties such as resistivity, critical current and critical temperature. Furthermore, we employ low-loss DC-coupled microwave resonators to characterise both their microwave properties and the non-linear kinetic inductance, comparing these findings to a determined non-linear kinetic model. Finally, we discuss the possibility of usage in a parametric amplifier.
引用
@article{arxiv.2605.05452,
title = {On-Chip Resonator for Nonlinear Kinetic Inductance Characterisation and Future Spectrometry Applications},
author = {Patrick Ashworth and Peter S. Barry and Chris S. Benson and Harry Gordon-Moys and Izaak Morris},
journal= {arXiv preprint arXiv:2605.05452},
year = {2026}
}