相关论文: Construction and evaluation of an ultrahigh-vacuum…
$Ar^+$ ion has been used regularly for the cleaning of semiconductor, metal surfaces for epitaxial nanostructures growth. We have investigated the effect of low-energy $Ar^+$ ion sputtering and subsequent annealing on the…
We have carried out a detailed programme to explore the superconducting characteristics of reactive DC-magnetron sputtered NbN. The basic principle is to ignite a plasma using argon, and then to introduce a small additional nitrogen flow to…
We have carried out a detailed programme to explore the superconducting characteristics of reactive DC-magnetron sputtered NbN. The basic principle is to ignite a plasma using argon, and then to introduce a small additional nitrogen flow to…
The superconducting critical temperature (Tc > 15K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multi-pixel imaging with advanced detectors. The drive for…
A new experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the…
We report on the realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Starting with the scientific requirements, which define the general design considerations, the…
The vacuum chamber of accelerator storage ring need clean ultra-high vacuum environment. TiZrV getter film which was deposited on interior wall of vacuum chamber, can realize distributed pumping, effectively improve the vacuum degree and…
We present a systematic study of the properties of TiN films by varying the deposition conditions in an ultra-high-vacuum reactive magnetron sputtering chamber. By increasing the deposition pressure from 2 to 9 mTorr while keeping a nearly…
Hafnium is an elemental superconductor which crystallizes in a hexagonal close packed structure, has a transition temperature $T_{C} \simeq 400 mK$, and has a high normal state resistivity around $90 \mu \Omega. cm$. In Microwave Kinetic…
Magnetron sputtering is a widely used physical vapor deposition technique. Reactive sputtering is used for the deposition of, e.g, oxides, nitrides and carbides. In fundamental research, versatility is essential when designing or upgrading…
Despite the prevalence of sputter deposition in the microelectronics industry, it has seen very limited applications for graphene electronics. In this letter, we report systematic investigation of the sputtering induced damages in graphene…
The new EUV Lithography tools for IC High Volume Manufacture at 22nm make use of EUV radiation at \lambda = 13.5nm. High power Laser (LPP) and Discharge (DPP)EUV light sources are based on Sn plasmas for the optimum conversion of electrical…
We present a viewport for use in Ultra-high vacuum (UHV) based upon the preflattened solder seal design presented in earlier work, Cox et al. Rev. Sci. Inst. 74, 3185 (2003). The design features significant modifications to improve long…
Proposals exist and efforts are under way to construct pulsed spallation ultra-cold neutron (UCN) sources at accelerator laboratories around the world. At the Paul Scherrer Institut (PSI), Switzerland, and at the Los Alamos National…
A new approach to deuterium ion sources for deuterium-tritium neutron generators is being developed. The source is based upon the field desorption of deuterium from the surfaces of metal tips. Field desorption studies of microfabricated…
A Kelvinox 400 dilution refrigerator with the ability to load samples onto the mixing chamber from the bottom of the cryostat has been combined with an ultrahigh-vacuum (UHV) deposition chamber equipped with molecular beam sources. The…
Proof-of-principle experiments have demonstrated an electrostatic field evaporation based deuterium ion source for use in compact, high-output deuterium-tritium neutron generators. The ion source produces principally atomic deuterium and…
Combinatorial sputtering is a physical vapor deposition method that enables the high-throughput synthesis of compositionally varied thin films. Using this technique, the effects of stoichiometry on specific properties of alloy thin films…
Our research group studies the deposition of high permittivity dielectrics by a non-standard method: high-pressure sputtering. The dielectrics studied here are gadolinium scandate deposited from dielectric targets, and gadolinium oxide…
We present the concept of the ultracold neutron (UCN) source with a superfluid helium-4 converter located in the thermal column of the WWR-K research reactor at the Institute of Nuclear Physics (INP) in Almaty, Kazakhstan. The conceptual…