相关论文: Effects of pressure on suspended micromechanical m…
We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the…
Squeeze film pressure sensors, exploiting the dynamical modification of the mechanical properties of oscillating elements due to the compression of a fluid in a small gap region, allow for direct and absolute pressure measurements. This…
Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of…
We investigate the electromechanical actuation of a pair of suspended silicon nitride membranes forming a monolithic optomechanical array. By controlling the membrane resonators' tensile stress via a piezoelectrically controlled compressive…
The resonance frequency of ultra-thin layered two-dimensional (2D) materials changes nonlinearly with the tension induced by the pressure from the surrounding gas. Although the dynamics of pressurized 2D material membranes have been…
The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high frequency motion. This effect is…
We report on the optical and mechanical characterization of arrays of parallel micromechanical membranes. Pairs of high-tensile stress, 100 nm-thick silicon nitride membranes are assembled parallel with each other with separations ranging…
Nonlinear interactions between vibrational modes play a crucial role in understanding the dynamical response of nanomechanical resonators. Here, we report the experimental observation and theoretical modeling of nonlinear mode coupling in a…
A detailed investigation of the structural and vibrational properties of various prestressed silicon nitride membranes patterned with one-dimensional photonic crystal structures is presented. The tensile stress-related deformation of the…
We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress Si$_3$N$_4$ membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the…
The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such…
We resolve the thermal motion of a high-stress silicon nitride nanobeam at frequencies far below its fundamental flexural resonance (3.4 MHz) using cavity-enhanced optical interferometry. Over two decades, the displacement spectrum is…
We experimentally and theoretically investigate mechanical nanooscillators coupled to the light in an optical ring resonator made of dielectric mirrors. We identify an optomechanical damping mechanism that is fundamentally different to the…
Nanomechanical resonances of two-dimensional (2D) materials are sensitive probes for condensed-matter physics, offering new insights into magnetic and electronic phase transitions. Despite extensive research, the influence of the spin…
Intercalation offers a promising way to alter the physical properties of two-dimensional (2D) layered materials. Here we investigate the electronic and vibrational properties of 2D layered MoSe$_2$ intercalated with atomic manganese at…
We present results from a study of the nonlinear intermodal coupling between different flexural vibrational modes of a single high-stress, doubly-clamped silicon nitride nanomechanical beam. The measurements were carried out at 100 mK and…
We theoretically analyse the dynamics of a suspended graphene membrane which is in tunnel contact with grounded metallic electrodes and subjected to ac-electrostatic potential induced by a gate electrode. It is shown that for such system…
The dynamic properties of membranes have been object of many researches since they can be used as sensor heads in different devices. Some methods have been proposed to solve the problem of determining the resonance frequencies and their…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
Mechanical dissipation poses an ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test…