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The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…

应用物理 · 物理学 2020-02-07 Ulrike Nabholz , Michael Curcic , Jan E. Mehner , Peter Degenfeld-Schonburg

Nonlinear elastic effects play an important role in the dynamics of microelectromechanical systems (MEMS). Duffing oscillator is widely used as an archetypical model of mechanical resonators with nonlinear elastic behavior. In contrast,…

其他凝聚态物理 · 物理学 2009-11-12 S. Zaitsev , O. Shtempluck , E. Buks , O. Gottlieb

We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of…

介观与纳米尺度物理 · 物理学 2013-12-17 Eddy Collin , Johannes Kofler , Sabine Lakhloufi , Sebastien Pairis , Yuriy M. Bunkov , Henri Godfrin

Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically…

偏微分方程分析 · 数学 2014-09-26 Philippe Laurencot , Christoph Walker

An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…

仪器与探测器 · 物理学 2012-08-27 Yi Zheng

We apply the well-established theoretical method developed for geometrical nonlinearities of micro/nano-mechanical clamped beams to circular drums. The calculation is performed under the same hypotheses, the extra difficulty being to…

介观与纳米尺度物理 · 物理学 2020-09-25 D. Cattiaux , S. Kumar , X. Zhou , A. Fefferman , E. Collin

This paper is a computational bifurcation analysis of a non-linear partial differential equation (PDE) characterizing equilibrium configurations in Micro electromechanical Systems (MEMS). MEMS are engineering systems that utilize…

动力系统 · 数学 2024-01-24 Charles Naudet , Alan E. Lindsay

Non-linearities play an important role in micro- and nano- electromechanical system (MEMS and NEMS) design. In common electrostatic and magnetic actuators, the forces and voltages can depend in a non-linear way on position, charge, current…

介观与纳米尺度物理 · 物理学 2013-08-14 Peter G. Steeneken , Jiri Stulemeijer

An idealized electrostatically actuated microelectromechanical system (MEMS) involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution…

偏微分方程分析 · 数学 2017-07-06 Philippe Laurencot , Christoph Walker

This work presents the mathematical modeling and numerical investigation of a thermo-controlled Micro-Electro-Mechanical System (MEMS) obtained by coupling an HP memristor with mechanical and electrical resonators. Using the linear drift HP…

混沌动力学 · 物理学 2026-05-29 N. G. Koudafokê , Thierry Njougouo , Hilda A. Cerdeira , C. H. Miwadinou

Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…

介观与纳米尺度物理 · 物理学 2018-06-14 Ulrike Nabholz , Wolfgang Heinzelmann , Jan E. Mehner , Peter Degenfeld-Schonburg

: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of…

材料科学 · 物理学 2021-11-04 Tejas S. Fanse

Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…

We present a novel mode of operation for Duffing-type nonlinear microelectromechanical (MEMS) devices whereby a self-sustained multi-frequency output is generated. This new librator regime creates a limit cycle around a dynamical fixed…

介观与纳米尺度物理 · 物理学 2021-06-10 Samer Houri , Motoki Asano , Hajime Okamoto , Hiroshi Yamaguchi

A variational approach is employed to find stationary solutions to a free boundary problem modeling an idealized electrostatically actuated MEMS device made of an elastic plate coated with a thin dielectric film and suspended above a rigid…

偏微分方程分析 · 数学 2014-09-10 Philippe Laurencot , Christoph Walker

The dynamics of a free boundary problem for electrostatically actuated microelectromechanical systems (MEMS) is investigated. The model couples the electric potential to the deformation of the membrane, the deflection of the membrane being…

偏微分方程分析 · 数学 2013-02-26 Joachim Escher , Philippe Laurencot , Christoph Walker

The evolution problem for a membrane based model of an electrostatically actuated microelectromechanical system (MEMS) is studied. The model describes the dynamics of the membrane displacement and the electric potential. The latter is a…

偏微分方程分析 · 数学 2012-11-27 Joachim Escher , Philippe Laurencot , Christoph Walker

This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…

其他计算机科学 · 计算机科学 2008-02-22 A. Ballestra , E. Brusa , M. G. Munteanu , A. Soma

In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touch- down whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical…

偏微分方程分析 · 数学 2013-10-02 A. E. Lindsay , J. Lega , K. B. Glasner

Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…

应用物理 · 物理学 2020-02-07 Ulrike Nabholz , Florian Stockmar , Jan E. Mehner , Peter Degenfeld-Schonburg
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