相关论文: High quality factor mg-scale silicon mechanical re…
We report the successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270$\times$96-$\mu$m resonator was shown to be reliable in audio detection for sound intensity levels…
Optical resonances in 1D photonic crystal microcavities are investigated numerically using finite-element light scattering and eigenmode solvers. The results are validated by comparison to experimental and theoretical findings from the…
We present a novel optomechanical inertial sensor for low frequency applications and corresponding acceleration measurements. This sensor has a resonant frequency of 4.7Hz, a mechanical quality factor of 476k, a test mass of 2.6 gram, and a…
We report on the design and performance of a cryogenic (300 mK) near-field scanning microwave microscope. It uses a microwave resonator as the near-field sensor, operating at a frequency of 6 GHz and microwave probing amplitudes down to 100…
Silicon carbide (SiC) has great potential for optomechanical applications due to its outstanding optical and mechanical properties. However, challenges associated with SiC nanofabrication have constrained its adoption in optomechanical…
A sensor that integrates high sensitivity micro-Hall effect magnetometry and high-frequency electron paramagnetic resonance spectroscopy capabilities on a single semiconductor chip is presented. The Hall-effect magnetometer was fabricated…
In recent years, nanomechanical oscillators in thin films of superfluid helium have attracted attention in the field of optomechanics due to their exceptionally low mechanical dissipation and optical scattering. Mechanical excitations in…
The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…
High-frequency atomic force microscopy has enabled extraordinary new science through large bandwidth, high speed measurements of atomic and molecular structures. However, traditional optical detection schemes restrict the dimensions, and…
We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…
Micron-scale optical cavities are produced using a combination of template sphere self-assembly and electrochemical growth. Transmission measurements of the tunable microcavities show sharp resonant modes with a Q-factor>300, and 25-fold…
We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…
We observe high optical quality factor (Q) polygonal and star coherent optical modes in a lithium niobate microdisk. In contrast to the previous polygon modes achieved by deformed microcavities at lower mechanical and optical Q, we adopted…
The use of superconducting micro-resonators in combination with quantum-limited Josephson parametric amplifiers has in recent years lead to more than four orders of magnitude improvement in the sensitivity of pulsed Electron Spin Resonance…
Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle…
Fano resonance is widely discussed in designing novel terahertz components, such as sensors, filters, modulators, and group delay modules. Usually, high quality (Q) factor and flexible tunability of Fano resonance are key requirements for…
Micro and nanomechanical resonators with ultra-low dissipation have great potential as useful quantum resources. The superfluid micromechanical resonators presented here possess several advantageous characteristics: straightforward…
We show that state-of-the-art phase noise and high frequency stability could be simultaneously achieved in a microwave oscillator based on the sapphire-loaded cavity resonator. The 9 GHz sapphire oscillator was constructed with the SSB…
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…
We present optically tunable magnetic 3D metamaterials at terahertz (THz) frequencies which exhibit a tuning range of ~30% of the resonance frequency. This is accomplished by fabricating 3D array structures consisting of double-split-ring…