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The focused helium ion beam microscope is a versatile imaging and nanofabrication instrument enabling direct-write lithography with sub-10-nm resolution. Subsurface damage and swelling of substrates due to helium ion implantation is…

应用物理 · 物理学 2024-10-08 Sherry Mo , Dana O. Byrne , Frances I. Allen

We demonstrate direct focused ion beam (FIB) writing as an enabling technology for realizing spin-wave-optics devices. It is shown that ion-beam irradiation changes the characteristics of YIG films on a submicron scale in a highly…

Gallium oxide is an ultra-wide bandgap semiconductor with excellent opto-electronic properties, making it a highly promising material for a wide range of applications and devices. In this article, we report how the optical, morphological,…

We report X-ray fluorescence (XRF) imaging of nanoscale inclusions of impurities for quantum technology. A very bright diffraction-limited focus of the X-ray beam produces very high sensitivity and resolution. We investigated gallium (Ga)…

We report on the deposition of gallium oxide using microwave irradiation technique on III nitride epi layers. We also report on the first demonstration of a gallium oxide device, a visible blind deep UV detector, with GaN based…

Scanning ion microscopy applications of novel focused ion beam (FIB) systems based on ultracold rubidium (Rb) and cesium (Cs) atoms were investigated via ion-induced electron and ion yields. Results measured on the Rb$^+$ and Cs$^+$ FIB…

仪器与探测器 · 物理学 2024-03-11 Y. Li , S. Xu , T. H. Loeber , E. J. D. Vredenbregt

Optomechanical resonators were fabricated on a silicon-on-insulator (SOI) substrate that had been implanted with phosphorus donors. The resonators' mechanical and optical properties were then measured (at 6 kelvin and room temperature)…

光学 · 物理学 2021-09-29 Cliona Shakespeare , Teemu Loippo , Henri Lyyra , Juha T. Muhonen

Optical microresonators have proven powerful in a wide range of applications, including cavity quantum electrodynamics, biosensing, microfludics, and cavity optomechanics. Their performance depends critically on the exact distribution of…

Nanoscale focused ion beams (FIBs) represent one of the most useful tools in nanotechnology, enabling nanofabrication via milling and gas-assisted deposition, microscopy and microanalysis, and selective, spatially resolved doping of…

原子物理 · 物理学 2021-06-09 J. J. McClelland , A. V. Steele , B. Knuffman , K. A. Twedt , A. Schwarzkopf , T. M. Wilson

Doping of substrates at desired locations is a key technology for spin-based quantum memory devices. Focused ion beam implantation is well-suited for this task due to its high spacial resolution. In this work, we investigate ion-beam…

Focused ion beams (FIBs) are widely used in nanofabrication for applications such as circuit repair, ultra-thin lamella preparation, strain engineering, and quantum device prototyping. Although the lateral spread of the ion beam is often…

仪器与探测器 · 物理学 2025-11-04 M. G. Masteghin , Z. P. Aslam , A. P. Brown , M. J. Whiting , S. K. Clowes , R. P. Webb , D. C. Cox

The effect of 30 keV Ga^+ ion beam irradiation on the low-temperature photoluminescence from a single crystal of the hybrid organic-inorganic perovskite MAPbBr3 is presented for the first time. The irradiation leads to the suppression of…

Nanoscale fabrication and characterisation techniques critically underpin a vast range of fields, including materials science, nanoelectronics and nanobiotechnology. Focused ion beam (FIB) techniques are particularly appealing due to their…

Focused ion beam irradiation of metastable Fe$_{78}$Ni$_{22}$ thin films grown on Cu(100) substrates is used to create ferromagnetic, body-centered-cubic patterns embedded into paramagnetic, face-centered-cubic surrounding. The structural…

Nanofibre-based optical cavities are particularly useful for quantum optics application, such as the development of integrated single-photon sources, and for studying fundamental light-matter interactions in cavity quantum electrodynamics…

The creation of nitrogen-vacancy centres in diamond is nowadays well controlled using nitrogen implantation and annealing. Although the high-resolution placement of NV centres has been demonstrated using either collimation through pierced…

Focused ion beams are indispensable tools in the semiconductor industry because of their ability to image and modify structures at the nanometer length scale. Here we report on performance predictions of a new type of focused ion beam based…

Helium-ion beams (HIB) focused to sub-nanometer scales have emerged as powerful tools for high-resolution imaging as well as nano-scale lithography, ion milling or deposition. Quantifying irradiation effects is essential for reliable device…

介观与纳米尺度物理 · 物理学 2017-03-21 Adrian Gozar , Nicholas E. Litombe , Jennifer E. Hoffman , Ivan Bozovic

Photo-ionization of a laser-cooled and compressed atomic beam from a high-flux thermal source can be used to create a high-brightness ion beam for use in Focus Ion Beam (FIB) instruments. Here we show using calculations and Doppler cooling…

Focused ion beam (FIB) microscopy suffers from source shot noise - random variation in the number of incident ions in any fixed dwell time - along with random variation in the number of detected secondary electrons per incident ion. This…

材料科学 · 物理学 2026-03-12 Minxu Peng , John Murray-Bruce , Karl K. Berggren , Vivek K Goyal