相关论文: Rigorous Simulations of 3D Patterns on Extreme Ult…
We perform 3D lithography simulations by using a finite-element solver. To proof applicability to real 3D problems we investigate DUV light propagation through a structure of size 9 microns times 4 microns times 65 nm. On this relatively…
EUV scatterometry is performed on 3D patterns on EUV lithography masks. Numerical simulations of the experimental setup are performed using a rigorous Maxwell solver. Mask geometry is determined by minimizing the difference between…
Rigorous electromagnetic field simulations are an essential part for scatterometry and mask pattern design. Today mainly periodic structures are considered in simulations. Non-periodic structures are typically modeled by large, artificially…
Hyperuniform metasurfaces promise an unusual form of wave control: the suppression of elastic scattering over extended angular ranges without periodic order. Here, we present a comprehensive experimental and theoretical study of 2D stealthy…
We present radiation transfer models that demonstrate that reflected light levels from three dimensional (3D) exoplanetary atmospheres can be more than 50% lower than those predicted by models of homogeneous or smooth atmospheres. Compared…
A unified method for three-dimensional reconstruction of objects from transmission images collected at multiple illumination directions is described. The method may be applicable to experimental conditions relevant to absorption-based,…
The field of biomedical imaging has undergone a rapid growth in recent years, mostly due to the implementation of ad-hoc designed experimental setups, theoretical support methods and numerical reconstructions. Especially for biological…
Matrix imaging paves the way towards a next revolution in wave physics. Based on the response matrix recorded between a set of sensors, it enables an optimized compensation of aberration phenomena and multiple scattering events that usually…
Consider a ultraviolet (UV) scattering communication system where the position of the transmitter is fixed and the receiver can move around on the ground. To obtain the link gain effectively and economically, we propose an algorithm based…
Three-dimensional phase contrast imaging of multiply-scattering samples in X-ray and electron microscopy is extremely challenging, due to small numerical apertures, the unavailability of wavefront shaping optics, and the highly nonlinear…
Near-field phase-shifting contact lithography is modeled to characterize electromagnetic absorption in a photoresist layer with one face in contact with a quartz binary phase-shift mask. The broadband ultraviolet illumination is represented…
With a two-dimensional (2D) optical mask, nanoscale patterns are created for the first time in an atom lithography process using metastable helium atoms. The internal energy of the atoms is used to locally damage a hydrofobic resist layer,…
The possibility to obtain a three-dimensional representation of a single object with sub-$\mu$m resolution is crucial in many fields, from material science to clinical diagnostics. This is typically achieved through tomography, which…
We use the finite-element method for simulating light transmission through a 2D-periodic array of rectangular apertures in a film of highly conductive material. We report results with a relative error of the transmissivity lower than 0.01%.…
A refined model of an extreme ultraviolet (EUV) mask stack consisting of the Mo/Si multilayer coated by a Ru protective layer and a TaBN/TaBO absorber layer was developed to facilitate accurate simulations of EUV mask performance for…
Developing a suitable production method for three-dimensional periodic nanostructures with high aspect ratios is a subject of growing interest. For mass production, Talbot lithography offers many advantages. However, one disadvantage is…
Optical images of transparent three-dimensional objects can be different from a replica of the object's cross section in the image plane due to refraction at the surface or in the body of the object. Simulations of the object's image are…
Traditional ultrasound simulation methods solve wave equations numerically, achieving high accuracy but at substantial computational cost. Faster alternatives based on convolution with precomputed impulse responses remain relatively slow,…
Scattering, especially multiple scattering, is a well known problem in imaging, ranging from astronomy to medicine. In particular it is often desirable to be able to perform non-invasive imaging through turbid and/or opaque media. Many…
Dynamic scattering and imaging with coherent, ultrafast, extreme ultraviolet (EUV) light sources can resolve charge, phonon and spin processes on their intrinsic length and time scales. However, full field coherent diffraction imaging…