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面向高效率 MEMS/NEMS 的片上自感知增强驱动

应用物理 2018-05-21 v3

作者: Meiyong Liao , Liwen Sang , Tokuyuki Teraji , Satoshi Koizumi , Yasuo Koide

在 arXiv 上查看 ↗ PDF ↗

摘要

由于材料选择、大损耗、高频限制、低灵敏度、差可靠性和差集成性等诸多困难，为任意谐振器实现片上 MEMS/NEMS 换能器十分困难。我们展示了一种通用的片上转导方案，可适用于任何 MEMS/NEMS 谐振器。我们实现了适用于任何谐振器的全电学、片上 MEMS/NEMS。

关键词

片上转导 MEMS/NEMS 谐振器自感知驱动任意谐振器电学转导

引用

@article{arxiv.1712.02918,
  title  = {On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency},
  author = {Meiyong Liao and Liwen Sang and Tokuyuki Teraji and Satoshi Koizumi and Yasuo Koide},
  journal= {arXiv preprint arXiv:1712.02918},
  year   = {2018}
}

备注

Some language is not well qualified as a scientific paper. In order not to lead misunderstanding, we would like to withdraw this paper