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Numerical Modeling of MEMS Resonators

Mesoscale and Nanoscale Physics 2016-12-07 v2
Authors: Hamid T. Chorsi , Meysam T. Chorsi , Stephen D. Gedney
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Abstract

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.

Keywords

microwave resonators nanomechanical resonators

Cite

@article{arxiv.1611.05310,
  title  = {Numerical Modeling of MEMS Resonators},
  author = {Hamid T. Chorsi and Meysam T. Chorsi and Stephen D. Gedney},
  journal= {arXiv preprint arXiv:1611.05310},
  year   = {2016}
}

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