铒掺杂薄膜铌酸锂上单片集成波导耦合单频微激光器
光学
2022-01-31 v1 应用物理
摘要
我们利用光刻辅助化学机械刻蚀（PLACE）技术，克服了在铒掺杂薄膜铌酸锂（Er: TFLN）上实现单片集成波导耦合微环激光器的困难。我们展示了工作于约 1531 nm 波长的集成单频微环激光器。PLACE 技术可实现低传输损耗的集成 Er: TFLN 光子学，从而可用于单片片上微激光器的低成本量产，其应用涵盖光通信、光子集成电路（PIC）、精密计量与大规模传感。
引用
@article{arxiv.2201.11959,
title = {Monolithically integrated waveguide-coupled single-frequency microlaser on erbium-doped thin film lithium niobate},
author = {Youting Liang and Junxia Zhou and Rongbo Wu and Zhiwei Fang and Zhaoxiang Liu and Shupeng Yu and Difeng Yin and Haisu Zhang and Yuan Zhou and Jian Liu and Zhenhua Wang and Min Wang and Ya Cheng},
journal= {arXiv preprint arXiv:2201.11959},
year = {2022}
}
备注
4 pages, 5 figures