相关论文: Quantum interferometric optical lithography:toward…
Over the past 20 years, bright sources of entangled photons have led to a renaissance in quantum optical interferometry. Optical interferometry has been used to test the foundations of quantum mechanics and implement some of the novel ideas…
No imaging apparatus can produce perfect images: spatial resolution is limited by the Rayleigh diffraction bound that is a consequence of the imager's finite spatial extent. We show some N-photon strategies that permit resolution of details…
The successful development of future photonic quantum technologies heavily depends on the possibility of realizing robust, reliable and, crucially, scalable nanophotonic devices. In integrated networks, quantum emitters can be deployed as…
Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this…
Like all of quantum information theory, quantum cryptography is traditionally based on two level quantum systems. In this letter, a new protocol for quantum key distribution based on higher dimensional systems is presented. An experimental…
Quantum lithography proposes to adopt entangled quantum states in order to increase resolution in interferometry. In the present paper we experimentally demonstrate that the output of a high-gain optical parametric amplifier can be intense…
Advances in micro-technology of the last years have made it possible to carry optics textbooks experiments over to atomic and molecular beams, such as diffraction by a double slit or transmission grating. The usual wave-optical approach…
The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern…
We investigate the use of a non-degenerate parametric oscillator (NDPO) as a source for quantum lithography, for which the light can have high-flux and strong non-classical features. This builds on the proposal of Boto, et al. [A. N. Boto,…
Quantum optics potentially offers an information channel from the Universe beyond the established ones of imaging and spectroscopy. All existing cameras and all spectrometers measure aspects of the first-order spatial and/or temporal…
For more than a century, the diffraction limit has defined the resolution achievable by passive optical imaging systems. Although some resolution improvement can be gained through classical data processing of the image, it is limited by the…
The wave-particle duality of light introduces two fundamental problems to imaging, namely, the diffraction limit and the photon shot noise. Quantum information theory can tackle them both in one holistic formalism: model the light as a…
High-dimensional biphoton states are promising resources for quantum applications, ranging from high-dimensional quantum communications to quantum imaging. A pivotal task is fully characterising these states, which is generally…
The manipulation of quantum entanglement has found enormous potential for improving performances of devices such as gyroscopes, clocks, and even computers. Similar improvements have been demonstrated for lithography and microscopy. We…
We investigate analytically and numerically the role of quantum fluctuations in reconstruction of optical objects from diffraction-limited images. Taking as example of an input object two closely spaced Gaussian peaks we demonstrate that…
The Abbe's diffraction limit restricts the resolution of an optical imaging and lithography system. Coherent Rabi oscillation is shown to be able to overcome the diffraction limit in both optical and atom lithography. In previous studies,…
Superresolution fluorescence microscopy techniques beat the diffraction limit, enabling ultra-high resolution imaging in biological physics and nanoscience. In all cases that have been studied experimentally, the resolution scales inversely…
Quantum lithography achieves phase super-resolution using fragile, experimentally challenging entangled states of light. We propose a scalable scheme for creating features narrower than classically achievable, with reduced use of quantum…
With a two-dimensional (2D) optical mask, nanoscale patterns are created for the first time in an atom lithography process using metastable helium atoms. The internal energy of the atoms is used to locally damage a hydrofobic resist layer,…
Quantum lithography (QL) has been suggested as a means of achieving enhanced spatial resolution for optical imaging, but its realization has been held back by the low multi-photon detection rates of recording materials. Recently, an optical…