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We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…

介观与纳米尺度物理 · 物理学 2013-01-24 M. Gonzalez , P. Zheng , E. Garcell , Y. Lee , H. B. Chan

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an…

介观与纳米尺度物理 · 物理学 2016-12-07 Hamid T. Chorsi , Meysam T. Chorsi , Stephen D. Gedney

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

介观与纳米尺度物理 · 物理学 2026-01-09 R. J. G. Elbertse , M. Xu , A. Keşkekler , S. Otte , R. A. Norte

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

仪器与探测器 · 物理学 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…

其他计算机科学 · 计算机科学 2013-01-15 Joydeep Basu , Tarun Kanti Bhattacharyya

Energy dissipation is an unavoidable phenomenon of physical systems that are directly coupled to an external environmental bath. The ability to engineer the processes responsible for dissipation and coupling is fundamental to manipulate the…

经典物理 · 物理学 2017-06-28 Changyao Chen , Damián H. Zanette , David Czaplewski , Steven Shaw , Daniel López

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…

其他计算机科学 · 计算机科学 2012-02-15 Ritesh Ray Chaudhuri , Joydeep Basu , Tarun Kanti Bhattacharyya

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

其他计算机科学 · 计算机科学 2007-11-29 V. Rochus , J. -C. Golinval , C. Louis , C. Mendez , I. Klapka

For the numerical simulations of physical and mechanical behaviors of materials at the micro-nano scale, a coupled model with the effect of local quantum is presented in this paper. Unlike traditional methods, the transition region is not…

材料科学 · 物理学 2014-07-03 Tiansi Han , Junzhi Cui

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…

应用物理 · 物理学 2023-03-22 Daehun Lee , Shahin Jahanbani , Jack Kramer , Ruochen Lu , Keji Lai

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…

计算物理 · 物理学 2007-05-23 N. Majumdar , S. Mukhopadhyay

Atomistic-continuum multiscale modelling is becoming an increasingly popular tool for simulating the behaviour of materials due to its computational efficiency and reliable accuracy. In the case of ferromagnetic materials, the atomistic…

计算物理 · 物理学 2019-02-01 Doghonay Arjmand , Mikhail Poluektov , Gunilla Kreiss

Studying the dynamical behavior of micro- and nano-mechanical systems (MEMS and NEMS) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to be able to precisely monitor the mechanical…

光学 · 物理学 2025-12-09 Agnes Zinth , Samer Houri , Menno Poot

This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…

其他计算机科学 · 计算机科学 2008-12-18 Mrigank Sharma , Akila Kannan , Edmond Cretu

We present a multiscale modeling approach that concurrently couples quantum mechanical, classical atomistic and continuum mechanics simulations in a unified fashion for metals. This approach is particular useful for systems where chemical…

材料科学 · 物理学 2009-11-11 Gang Lu , E. B. Tadmor , Efthimios Kaxiras

Due to the rapid growth in demand for power for sensing devices located in remote locations, scientists' attention has been drawn to vibration energy harvesting as an alternative to batteries. As a result of over two decades of micro-scale…

仪器与探测器 · 物理学 2018-05-15 Masoud Derakhshani , Brian E. Allgeier , Thomas A. Berfield

This paper is a computational bifurcation analysis of a non-linear partial differential equation (PDE) characterizing equilibrium configurations in Micro electromechanical Systems (MEMS). MEMS are engineering systems that utilize…

动力系统 · 数学 2024-01-24 Charles Naudet , Alan E. Lindsay

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando…

应用物理 · 物理学 2018-11-21 Craig R. Copeland , Craig D. McGray , Jon Geist , Samuel M. Stavis

Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…

信号处理 · 电气工程与系统科学 2020-05-15 Abhishek Srivastava , Baibhab Chatterjee , Udit Rawat , Yanbo He , Dana Weinstein , Shreyas Sen

This work presents the mathematical modeling and numerical investigation of a thermo-controlled Micro-Electro-Mechanical System (MEMS) obtained by coupling an HP memristor with mechanical and electrical resonators. Using the linear drift HP…

混沌动力学 · 物理学 2026-05-29 N. G. Koudafokê , Thierry Njougouo , Hilda A. Cerdeira , C. H. Miwadinou
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