相关论文: Nanoscale Mechanical Structures Fabricated from Si…
Fabrication of superconducting nanomechanical resonators for quantum research, detectors and devices traditionally relies on a lithographic process, resulting in oscillators with sharp edges and a suspended length limited to a few 100…
A chemical nanomachining process for the rapid, scalable production of nanostructure assemblies from silicon-on-insulator is demonstrated. The process is based on the spontaneous, local oxidation of Si induced by Au, which is selectively…
The mid-infrared region is crucial for elucidating the unique biochemical signatures of microorganisms. The MIR resonant structures turned out to facilitate exceptional performance owing to the enhance electric field confinement in the…
Amorphous insulators have localized wave functions that decay with the distance $r$ following exp($-r/\zeta$). Since nanoscale conduction is not excluded at $r<\zeta$, one may use amorphous insulators and take advantage of their size effect…
It may be possible to reinvent how microelectronics are made using a two step process: (1) Synthesizing modular, nanometer-scale components -- transistors, sensors, and other devices -- and suspending them in a liquid "ink" for storage or…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
Miniaturizing nonlinear optical components is essential for integrating advanced light manipulation into compact photonic devices, enabling scalable and cost-effective applications. While monocrystalline lithium niobate thin films advance…
Several methods are constructed for large-scale electronic structure calculations. Test calculations are carried out with up to 10^7 atoms. As an application, cleavage process of silicon is investigated by molecular dynamics simulation with…
Nanofabrication techniques for superconducting qubits rely on resist-based masks patterned by electron-beam or optical lithography. We have developed an alternative nanofabrication technique based on free-standing silicon shadow masks…
The relevant length scales for superconductivity are of the order of nanometers. By confining the superconducting condensate to such dimensions, many physical properties change substantially, and novel phenomena emerge, which are absent in…
Recent theoretical calculations and photoemission spectroscopy measurements on the bulk Bi2Se3 material show that it is a three-dimensional topological insulator possessing conductive surface states with nondegenerate spins, attractive for…
Additive microfabrication processes based on localized electroplating enable the one-step deposition of micro-scale metal structures with outstanding performance, e.g. high electrical conductivity and mechanical strength. They are therefore…
The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing…
In this report, we present nanoelectromechanical resonators fabricated with thin exfoliated crystals of a high-T$_c$ cuprate superconductor Bi$_2$Sr$_2$Ca$_1$Cu$_2$O$_{8+\delta}$. The mechanical readout is performed by capacitively coupling…
We present superconducting monocrystalline Silicon On Insulator thin 33 nm epilayers. They are obtained by nanosecond laser annealing under ultra-high vacuum on 300 mm wafers heavily pre-implantated with boron ($2.5\times \,10^{16}\,…
For most practical applications in electronic devices, two-dimensional materials should be transferred onto semiconducting or insulating substrates, since they are usually generated on metallic substrates. However, the transfer often leads…
We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1 M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate…
We experimentally demonstrate the use of subwavelength optical nanoantennae to assist the gentle ablation of nanostructures directly using ultralow fluence from a Ti: sapphire oscillator through the excitation of surface plasmon waves. We…
A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important for advanced CMOS technology and thus are evaluated as…
Nanomechanical resonators, machined out of Silicon-on-Insulator wafers, are operated in the nonlinear regime to investigate higher-order mechanical mixing at radio frequencies, relevant to signal processing and nonlinear dynamics on…