相关论文: Curvilinear Mask Optimization for Inverse Lithogra…

As the feature size of integrated circuits continues to decrease, optical proximity correction (OPC) has emerged as a crucial resolution enhancement technology for ensuring high printability in the lithography process. Recently, level…

Inverse Lithography Technology (ILT) has emerged as a promising solution for photo mask design and optimization. Relying on multi-beam mask writers, ILT enables the creation of free-form curvilinear mask shapes that enhance printed wafer…

In the realm of lithography, Optical Proximity Correction (OPC) is a crucial resolution enhancement technique that optimizes the transmission function of photomasks on a pixel-based to effectively counter Optical Proximity Effects (OPE).…

An extension of the restricted Delaunay-refinement algorithm for surface mesh generation is described, where a new point-placement scheme is introduced to improve element quality in the presence of mesh size constraints. Specifically, it is…

Diffractive lenses have recently been applied to the domain of multispectral imaging in the X-ray and UV regimes where they can achieve very high resolution as compared to reflective and refractive optics. Conventionally, spectral…

Reconstruction of geometry based on different input modes, such as images or point clouds, has been instrumental in the development of computer aided design and computer graphics. Optimal implementations of these applications have…

Triangle meshes remain the most popular data representation for surface geometry. This ubiquitous representation is essentially a hybrid one that decouples continuous vertex locations from the discrete topological triangulation.…

A Frontal-Delaunay refinement algorithm for mesh generation in piecewise smooth domains is described. Built using a restricted Delaunay framework, this new algorithm combines a number of novel features, including: (i) an unweighted,…

Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based OPC, termed as inverse lithography technology (ILT), has…

This paper proposes improvements to the physically-based surface triangulation method, bubble meshing. The method simulates physical bubbles to automatically generate mesh vertices, resulting in high-quality Delaunay triangles. Despite its…

We consider the inverse problem of determining an optical mask that produces a desired circuit pattern in photolithography. We set the problem as a shape design problem in which the unknown is a two-dimensional domain. The relationship…

This paper presents an iterative inversion algorithm for computed tomography image reconstruction that performs well in terms of accuracy and speed using limited data. The computational method combines an image domain technique and…

We introduce a new approach for identifying and characterizing voids within two-dimensional (2D) point distributions through the integration of Delaunay triangulation and Voronoi diagrams, combined with a Minimal Distance Scoring algorithm.…

The objective of this study is to address the difficulty of simplifying the geometric model in which a differential problem is formulated, also called defeaturing, while simultaneously ensuring that the accuracy of the solution is…

A universal and flexible design method for freeform surface that can modulate the distribution of an zero-\'etendue source to an arbitrary irradiance distribution is a significant challenge in the field of non-imaging optics. Current design…

The inverse diffusion curve problem focuses on automatic creation of diffusion curve images that resemble user provided color fields. This problem is challenging since the 1D curves have a nonlinear and global impact on resulting color…

This paper introduces a novel curve-based slicing method for generating planar layers with dynamically varying orientations in digital light processing (DLP) 3D printing. Our approach effectively addresses key challenges in DLP printing,…

Tabular anomaly detection, which aims at identifying deviant samples, has been crucial in a variety of real-world applications, such as medical disease identification, financial fraud detection, intrusion monitoring, etc. Although recent…

We formulate as an inverse problem the construction of sparse parametric continuous curve models that fit a sequence of contour points. Our prior is incorporated as a regularization term that encourages rotation invariance and sparsity. We…

Computing the envelope of deforming planar domains is a significant and challenging problem with a wide range of potential applications. We approximate the envelope using circular arc splines, curves that balance geometric flexibility and…