相关论文: Error Source Sensitivity Analysis in Model-Based C…
We propose a theoretical study for Si thin film thickness measurement that is based on incident low energy electron beam on the film and counting the transmitted/incident electron fraction. It estimates the thin film thickness distribution…
When the thickness of the layer is smaller than the electrons mean free path, the morphology affects the conductivity directly based on the layer thickness. This issue provides basis in order to estimate the thickness of the layer by…
This study presents a comprehensive methodology for determining the thermal conductivity (TC) of materials with high reliability. The methodology addresses issues such as surface topographical variations and substrate interference by…
In this paper, a thin film thickness gauge based on the interferometric principle of Y-shaped optical fiber is proposed to achieve accurate measurement of film thickness. In this paper, the optical fiber, the interferometric principle and…
Recent advancements have extended the capabilities of coherence scanning interferometry (CSI) beyond surface topography measurement to reflectivity spectrum imaging. It is commonly accepted that the one-dimensional(1-D) Fourier magnitude of…
Thin film interferometry is a powerful technique for non-invasively measuring liquid film thickness with applications in ophthalmology, but its clinical translation is hindered by the challenges in reconstructing thickness profiles from…
Diffraction of light beams from the phase steps due to the abrupt changes in the boundary of step leads to Fresnel fringes that their visibility and intensity profile depend on the change of the step height or light incident angle. The…
A new approach was proposed to accurately determine the thickness of film, especially for ultra-thin film, through spectrum fitting with the assistance of interference layer. The determination limit can reach even less than 1 nm. Its…
The detection of spatial or temporal variations in very thin samples has important applications in the biological sciences. For example, cellular membranes exhibit changes in lipid composition and order, which in turn modulate their…
Precise measurements of the geometrical thickness of a sample and its refractive index are important for materials science, engineering, and medical diagnosis. Among the possible non-contact evaluation methods, optical interferometric…
We propose using THz frequency selective surfaces interrogated with THz subwavelength optical fibers as sensors for monitoring of the optical properties of thick films that are brought in contact with such surfaces. Changes in the test film…
The problem of determining the porous silicon (PSi) optical constants, thickness, porosity, and surface quality using just reflectance data is board employing evolutionary algorithms. The reflectance measurements were carried out of PSi…
10 H SiC thin films are potential candidates for devices that can be used in high temperature and high radiation environment. Measurement of thermal conductivity of thin films by a non-invasive method is very useful for such device…
We apply the superconducting proximity effect in TiN/Ti multi-layer films to tune the critical temperature, Tc, to within 10 mK with high uniformity (less than 15 mK spread) across a 75 mm wafer. Reproducible Tc's are obtained from 0.8 -…
This article introduces a thin-film thermocouple temperature sensor with symmetrical electrode structure. It uses PI film as a flexible substrate. Cu film and CuNi film made by MEMS manufacturing process as positive and negative electrodes.…
Thermal conductivity and interfacial thermal conductance play crucial roles in the design of engineering systems where temperature and thermal stress are of concerns. To date, a variety of measurement techniques are available for both bulk…
Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific…
We present a robust, precise, and accurate method to simultaneously measure the refractive indices of two transparent materials within an interference coating. This is achieved by measuring both a photometrically accurate transmittance…
This work discusses an extension to conventional low-coherence interferometry by the introduction of dispersion-encoding. The extension facilitates the measurement of surface height profiles with sub-nm resolution. The selection of a…
Investigations into the propagation characteristics, specifically loss and wave velocity, of superconducting coplanar waveguides and microstrip lines were conducted at a 2 mm wavelength. This was achieved through the measurement of on-chip…