相关论文: Niobate-on-Niobate Resonators with Aluminum Electr…
Lithium Niobate (LN or just niobate) thin-film micro-photonic resonators have promising prospects in many applications including high efficiency electro-optic modulators, optomechanics and nonlinear optics. This paper presents free-standing…
This paper reports a suspended thin-film lithium niobate (LN) piezoelectric resonator platform surviving high annealing temperatures of 550 {\deg}C, among the highest temperature at which the thermal resilience of suspended LN resonators is…
Lithium Niobate (LN) is an important nonlinear optical material. Here we demonstrate LN microdisk resonators that feature optical quality factor ~ 100,000, realized using robust and scalable fabrication techniques, that operate over a wide…
This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, piezoelectric MEMS devices are expected to sustain severe…
This work presents a novel hydrogen sensor based on 30% scandium-doped aluminum nitride (ScAlN) laterally vibrating resonators (LVRs) functionalized with a palladium (Pd) thin film. The micro-electro-mechanical system (MEMS) device operates…
Lithium niobate (LN) exhibits unique material characteristics that have found many important applications. Scaling LN devices down to a nanoscopic scale can dramatically enhance light-matter interaction that would enable nonlinear and…
Optomechanical transduction harnesses the interaction between optical fields and mechanical motion to achieve sensitive measurement of weak mechanical quantities with inherently low noise. Lithium niobate combines low optical loss, strong…
Lithium niobate (LN) is an excellent nonlinear optical and electro-optic material that has found many applications in classical nonlinear optics, optical fiber communications and quantum photonics. Here we review the recent development of…
This work presents the design, fabrication, and testing of X-Cut Lithium Niobate (LN) acoustic nanoelectromechanical (NEMS) Laterally Vibrating Resonators (LVRs) and Degenerate LVRs (d-LVRs) operating in the S0 (YZ30) and SH0 (YZ-10) modes…
Lithium niobate (LN), an outstanding and versatile material, has influenced our daily life for decades: from enabling high-speed optical communications that form the backbone of the Internet to realizing radio-frequency filtering used in…
The demand for high-performance electromechanical resonators is ever-growing across diverse applications, ranging from sensing and time-keeping to advanced communication devices. Among the electromechanical materials being explored,…
Thin-film lithium niobate (TFLN) has emerged as a promising platform for the realization of high performance chip-scale optical systems, spanning a range of applications from optical communications to microwave photonics. Such applications…
As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonators operating in the fundamental symmetric (S0) Lamb mode hold…
This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500{\deg}C in air. After a high-temperature burn-in treatment, device…
Recent advances in the processing of thin-film LNOI have enabled low-loss photonic integrated circuits, modulators with improved half-wave voltage, electro-optic frequency combs and novel on-chip electro-optic devices, with applications…
Thin-film lithium niobate (TFLN) has a proven record of building high-performance electro-optical (EO) modulators. However, its CMOS incompatibility and the need for non-standard etching have consistently posed challenges in terms of…
Lithium niobate (LNO) is a well established material for surface acoustic wave (SAW) devices including resonators, delay lines and filters. Recently, multi-layer substrates based on LNO thin films have become commercially available. Here,…
We demonstrate waveguide-integrated superconducting nanowire single-photon detectors on thin-film lithium niobate (LN). Using a 250 um-long NbN superconducting nanowire lithographically defined on top of a 125 um-long LN nanowaveguide,…
Integrated lithium niobate (LN) photonics is a promising platform for future chip-scale microwave photonics systems owing to its unique electro-optic properties, low optical loss and excellent scalability. A key enabler for such systems is…