相关论文: On-chip frequency tuning of fast resonant MEMS sca…
Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle,…
We present the design and fabrication of a miniaturized array of piezoelectrically actuated high speed Fresnel mirrors with individual mirror control. These Fresnel mirrors can be used to generate propagation invariant and self-healing…
Suspended optical microresonators are promising devices for on-chip photonic applications such as radio-frequency oscillators, optical frequency combs, and sensors. Scaling up these devices demand the capability to tune the optical…
The resonance frequency of an optical whispering gallery mode (WGM) microcavity is extremely important in its various applications. Many efforts have been made to fine tune this parameter. Here, we report the design and implementation of a…
This work presents the design, simulation, fabrication, and characterization of a novel architectural compact two-dimensional (2D) resonant MEMS scanning mirror actuated by thin-film lead zirconate titanate (PZT). The device employs an…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
We present a silicon optomechanical nanobeam design with a dynamically tunable acoustic mode at 10.2 GHz. The resonance frequency can be shifted by 90 kHz/V^2 with an on-chip capacitor that was optimized to exert forces up to 1 $\mu$N at 10…
A multi-level tunable reflection array wide-angle beam scanning method is proposed to address the limited bandwidth and small scanning angle issues of current terahertz beam scanning technology. In this method, a focusing lens and its array…
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
Optomechanical crystals are a promising device platform for quantum transduction and sensing. Precise targeting of the optical and acoustic resonance frequencies of these devices is crucial for future advances on these fronts. However,…
Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…
High spectral purity frequency agile room temperature sources in the terahertz spectrum are foundational elements for imaging, sensing, metrology, and communications. Here we present a chip scale optical parametric oscillator based on an…
We report on fabrication of a microtoroid resonator of high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3D)…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for high frequency signal processing circuits like reference oscillators and filters. This is due to their exceptional features like small size, large…
Tuning the frequency of a resonant element is of vital importance in both the macroscopic world, such as when tuning a musical instrument, as well as at the nanoscale. In particular, precisely controlling the resonance frequency of isolated…
On-chip nonlinear photonic conversion functions with wide and precise tunability as well as high conversion efficiency are highly desirable for a wide range of applications. Photonic crystal micro-ring resonators (PhCR) facilitate efficient…
Hybrid systems consisting of a quantum emitter coupled to a mechanical oscillator are receiving increasing attention for fundamental science and potential applications in quantum technologies. In contrast to most of the presented works, in…
Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…
Reconfigurable photonic circuits have applications ranging from next-generation computer architectures to quantum networks, coherent radar and optical metamaterials. However, complete reconfigurability is only currently practical on…