相关论文: Analysis of Ferroelectric Negative Capacitance-Hyb…

We propose a framework to model ferroelectric negative capacitance: electrostatic Micro Electro Mechanical Systems (MEMS) hybrid actuators and analyze their dynamic (step input) response. Using this framework, we report the first proposal…

A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge…

This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Electrostatic actuators are simple but important switching devices for MEMS applications. Due to the difficulties associated with the electrostatic nonlinearity, precise mathematical description is often hard to obtain for the dynamics of…

In this paper we present an electronic circuit for position or capacitance estimation of MEMS electrostatic actuators based on a switched capacitor technique. The circuit uses a capacitive divider configuration composed by a fixed capacitor…

We study the local well-posedness of the solution to a coupled nonlinear elliptic-parabolic system which models electrical discharge in a Micro-Electro-Mechanical System (MEMS). A simple MEMS capacitor device contains two plates acting as…

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…

This paper presents the analysis of an efficient alternative interface circuit for MEMS electrostatic energy harvesters. It is entirely composed by diodes and capacitors. Based on modeling and simulation, the anti-phase gap-closing…

We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

This paper presents results about fabrication and operation of electrostatic actuators in liquids with various permittivities. In the static mode, we provide experimental and theoretical demonstration that the pull-in effect can be shifted…

Due to the rapid growth in demand for power for sensing devices located in remote locations, scientists' attention has been drawn to vibration energy harvesting as an alternative to batteries. As a result of over two decades of micro-scale…

The use of integrated MicroElectroMechanical systems (MEMS) is recently spread thanks to their improved sensitivity, accuracy and reliability. Accurate preliminary computations born from the need of high precision in the manufacturing…

We study the electrothermal actuation of nanomechanical motion using a combination of numerical simulations and analytical solutions. The nanoelectrothermal actuator structure is a u-shaped gold nanoresistor that is patterned on the anchor…

This work presents the mathematical modeling and numerical investigation of a thermo-controlled Micro-Electro-Mechanical System (MEMS) obtained by coupling an HP memristor with mechanical and electrical resonators. Using the linear drift HP…

We present electrothermal microelectromechanical (MEMS) actuators as a practical platform for straining 2D materials. The advantages of the electrothermal actuator is its high output force and displacement for low input voltage, but its…

This dissertation presents a new coupled electro-mechanical model that is an improvement on the classical parallel-plate approximation. The model employs a hyperbolic function to account for the beam deformed shape and electrostatic field.…

The concept of a nano-actuator that uses ferroelectric switching to generate enhanced displacements is explored using a phase-field model. The actuator has a ground state in the absence of applied electric field that consists of polarized…

We report on low temperature measurements performed on micro-electro-mechanical systems (MEMS) driven deeply into the non-linear regime. The materials are kept in their elastic domain, while the observed non-linearity is purely of…