相关论文: Vector Magnetic Current Imaging of an 8 nm Process…
Current density distributions in active integrated circuits (ICs) result in patterns of magnetic fields that contain structural and functional information about the IC. Magnetic fields pass through standard materials used by the…
The continuous scaling of semiconductor-based technologies to micron and sub-micron regimes has resulted in higher device density and lower power dissipation. Many physical phenomena such as self-heating or current leakage become…
The Quantum Diamond Microscope (QDM) is an emerging magnetic imaging tool enabling noninvasive characterization of electronic circuits through spatially mapping current densities. In this work, we demonstrate wafer-level current sensing of…
Magnetic imaging with nitrogen-vacancy centers in diamond, also known as quantum diamond microscopy, has emerged as a useful technique for the spatial mapping of charge currents in solid-state devices. In this work, we investigate an…
Wide-field imaging of magnetic signals using ensembles of nitrogen-vacancy (NV) centers in diamond has garnered increasing interest due to its combination of micron-scale resolution, millimeter-scale field of view, and compatibility with…
As integrated circuit (IC) geometry and packaging become more sophisticated with ongoing fabrication and design innovations, the electrical engineering community needs increasingly-powerful failure analysis (FA) methods to meet the growing…
Quantum Diamond Microscope (QDM) magnetic field imaging is an emerging interrogation and diagnostic technique for integrated circuits (ICs). To date, the ICs measured with a QDM were either too complex for us to predict the expected…
The nitrogen vacancy (NV) center in diamond is an increasingly popular quantum sensor for microscopy of electrical current, magnetization, and spins. However, efficient NV-sample integration with a robust, high-quality interface remains an…
We provide an overview of the experimental techniques, measurement modalities, and diverse applications of the Quantum Diamond Microscope (QDM). The QDM employs a dense layer of fluorescent nitrogen-vacancy (NV) color centers near the…
The reconstruction of electrical current densities from magnetic field measurements is an important technique with applications in materials science, circuit design, quality control, plasma physics, and biology. Analytic reconstruction…
We present a novel technique based on an ensemble of Nitrogen-Vacancy (NV) centers in diamond to perform Magnetic Current Imaging (MCI) on an Integrated Circuit (IC). NV centers in diamond allow measuring the three components of the…
The increasing complexity of advanced semiconductor packages, driven by chiplet architectures and 2.5D/3D integration, challenges conventional failure localization methods such as lock-in thermography (LIT) and complicates current Failure…
The quantum diamond microscope (QDM) is a recently developed technology for near-field imaging of magnetic fields with micron-scale spatial resolution. In the present work, we integrate a QDM with a narrowband measurement protocol and a…
Remanent magnetization in geological samples may record the past intensity and direction of planetary magnetic fields. Traditionally, this magnetization is analyzed through measurements of the net magnetic moment of bulk millimeter to…
On-chip magnetic field sensing with Nitrogen-Vacancy (NV) centers in diamond requires scalable integration of 3D waveguides into diamond substrates. Here, we develop a sensing array device with an ensemble of shallow implanted NV centers…
The recently-developed ability to control phosphorous-doping of silicon at an atomic level using scanning tunneling microscopy (STM), a technique known as atomic-precision-advanced-manufacturing (APAM), has allowed us to tailor electronic…
Magnetic current imaging (MCI) is useful for non-destructive characterization of microelectronics, including both security analysis and failure analysis, because magnetic fields penetrate the materials that comprise these components to…
Nitrogen-vacancy (NV) centers in diamond are a leading modality for magnetic sensing and imaging under ambient conditions. However, these sensors suffer from degraded performance due to paramagnetic impurities and regions of stress in the…
Quantum diamond microscopy (QDM), which employs nitrogen-vacancy (NV) center ensembles, is a promising approach to quantitatively imaging magnetic fields with both high resolution that approaches the diffraction limit and a wide field of…
Three-dimensional magnetic imaging with high spatio-temporal resolution is critical for probing current paths in various systems, from biosensing to microelectronics. Conventional 2D Fourier-based current source localization methods are…