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相关论文: Characterization of angularly resolved EUV emissio…

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Experimental spectroscopic studies are presented, in a 5.5--25.5nm extreme-ultraviolet (EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin microdroplets by 5-ns-pulsed, 2-$\mu$m-wavelength laser…

等离子体物理 · 物理学 2021-04-07 R. Schupp , L. Behnke , J. Sheil , Z. Bouza , M. Bayraktar , W. Ubachs , R. Hoekstra , O. O. Versolato

We present the results of spectroscopic measurements in the extreme ultraviolet (EUV) regime (7-17 nm) of molten tin microdroplets illuminated by a high-intensity 3-J, 60-ns Nd:YAG laser pulse. The strong 13.5 nm emission from this…

原子物理 · 物理学 2018-01-29 F. Torretti , R. Schupp , D. Kurilovich , A. Bayerle , J. Scheers , W. Ubachs , R. Hoekstra , O. O. Versolato

We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the new experimental platform, "SparkLight". Tin plasmas are…

等离子体物理 · 物理学 2026-02-04 Stanislav Musikhin , Anatoli Morozov , Alec Griffith , Shurik Yatom , Ahmed Diallo

We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by laser wavelengths in the $\lambda_{\mathrm{laser}} = 1.064 - 10.6 $ $\mu$m range. Detailed numerical simulations of laser-irradiated spherical tin…

等离子体物理 · 物理学 2023-04-05 D. J. Hemminga , O. O. Versolato , J. Sheil

Laser-produced plasma (LPP) induced during irradiation of a liquid tin droplet with diameter of 150 um and 180 um by CO2 laser pulse with various pulse durations and energies is considered. The two-dimensional radiative magnetohydrodynamic…

等离子体物理 · 物理学 2022-10-05 Vasily S Zakharov , Xinbing Wang , Sergey V. Zakharov , Duluo Zuo , Junwu Wang

An extreme ultraviolet (EUV) single attosecond pulse passing through a laser-dressed dense gas is studied theoretically. The weak EUV pulse pumps the helium gas from the ground state to the 2s2p(1P) autoionizing state, which is coupled to…

原子物理 · 物理学 2013-01-18 Wei-Chun Chu , C. D. Lin

The next generation of lithography machines uses extreme ultraviolet (EUV) light originating from laser-produced plasma (LPP) sources, where a small tin droplet is ionized by an intense laser pulse to emit the requested light at 13.5 nm.…

Pulses of extreme ultraviolet (XUV) light, with wavelengths between 10 and 100$\,$nm, can be used to image and excite ultra-fast phenomena such as the motion of atomic electrons. Here we show that the illumination of plasma with…

等离子体物理 · 物理学 2018-08-24 T. G. Blackburn , A. A. Gonoskov , M. Marklund

To generate laser with short wavelength is a bottle-neck problem in laser technology. The extreme ultraviolet (EUV) lasers are usually produced with low efficiency by nonlinear multi-photon process. Here we show the generation of 58.4 nm…

光学 · 物理学 2023-06-28 Daobiao Hong , Bingke Xiang , Tong Wu , Zhensheng Tao , Yihua Wang , Zhonghao Liu , Shan Qiao

The extreme ultraviolet (XUV) emission from dense plasmas generated with sub-10-fs laser pulses with varying peak intensities up to 3*10^16 W/cm^2 is investigated for different target materials. K shell spectra are obtained from low Z…

等离子体物理 · 物理学 2009-11-13 J. Osterholz , F. Brandl , M. Cerchez , T. Fischer , D. Hemmers , B. Hidding , A. Pipahl , G. Pretzler , S. J. Rose , O. Willi

We demonstrate laser-plasma acceleration of high charge electron beams to the ~10 MeV scale using ultrashort laser pulses with as little energy as 10 mJ. This result is made possible by an extremely dense and thin hydrogen gas jet. Total…

加速器物理 · 物理学 2015-11-11 A. J. Goers , G. A. Hine , L. Feder , B. Miao , F. Salehi , H. M. Milchberg

We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density…

等离子体物理 · 物理学 2014-07-07 R. M. van der Horst , J. Beckers , S. Nijdam , G. M. W. Kroesen

We report the first direct demonstration of possibility to generate the extreme ultraviolet (EUV) radiation with a freely expanding jet of dense plasma with multiply-charged ions supported by high-power microwaves. The detected emission…

The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impact on the highly delicate mirrors It is essential to…

等离子体物理 · 物理学 2015-07-07 R. M. van der Horst , J. Beckers , E. A. Osorio , V. Y. Banine

Deep ultraviolet (DUV) laser pulses with tuneable wavelength and very short duration are a key enabling technology for next-generation technology and ultrafast science. Their generation has been the subject of extensive experimental effort,…

光学 · 物理学 2023-01-10 Christian Brahms , John C. Travers

The radiation pressure of next generation ultra-high intensity ($>10^{23}$ W/cm$^{2}$) lasers could efficiently accelerate ions to GeV energies. However, nonlinear quantum-electrodynamic effects play an important role in the interaction of…

The paper reports the results of two-dimensional particle-in-cell simulations of proton beam acceleration at the interactions of a 130 fs laser pulse of intensity from the range of 10^21-10^23 W/cm^2, predicted for the Extreme Light…

等离子体物理 · 物理学 2017-08-01 Jaroslaw Domanski , Jan Badziak , Slawomir Jablonski

We report on new findings in a laser driven enhanced electron beam generation in the multi MeV energy range at moderate relativistic laser intensities and their applications. In our experiment, an intense sub-picosecond laser pulse…

The results from 2.5-dimensional Particle-in-Cell simulations for the interaction of a picosecond-long ignition laser pulse with a plasma pellet of 50-$\mu m$ diameter and 40 critical density are presented. The high density pellet is…

等离子体物理 · 物理学 2009-11-11 C. Ren , M. Tzoufras , J. Tonge , W. B. Mori , F. S. Tsung , M. Fiore , R. A. Fonseca , L. O. Silva , J. -C. Adam , A. Heron

We report on the generation of intense extreme ultraviolet (EUV) supercontinuum with photon energies spanning from 35 eV to 50 eV (i. e., supporting an isolated attosecond pulse with a duration of ~271 as) by loosely focusing 35 fs, 11 mJ…

光学 · 物理学 2015-05-30 Bin Zeng , Wei Chu , Guihua Li , Jinping Yao , Jielei Ni , Haisu Zhang , Ya Cheng , Zhizhan Xu
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