相关论文: Extracting Dimensional Parameters of Gratings Prod…

Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of…

The feature sizes of only a few nanometers in modern nanotechnology and next-generation microelectronics continually increase the demand for suitable nanometrology tools. Grazing incidence small-angle X-ray scattering (GISAXS) is a…

GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting…

Grazing-Incidence Small-Angle X-ray Scattering (GISAXS) is a modern imaging technique used in material research to study nanoscale materials. Reconstruction of the parameters of an imaged object imposes an ill-posed inverse problem that is…

In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm x 15 mm on photonic structures produced by nanoimprint lithography. The photonic…

We demonstrate a grazing-incidence x-ray platform that simultaneously records time-resolved grazing-incidence small-angle x-ray scattering (GISAXS) and grazing-incidence x-ray diffraction (GID) from a femtosecond laser-irradiated gold film…

Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the…

High-resolution ($R = \lambda /\Delta \lambda > 2000$) x-ray absorption and emission line spectroscopy in the soft x-ray band is a crucial diagnostic for the exploration of the properties of ubiquitous warm and hot plasmas and their…

Grating interferometer is a state of art x-ray imaging approach, which can simultaneously acquire information of x-ray attenuation, phase shift, and small angle scattering. This approach is very sensitive to micro-structural variation and…

Small angle X-ray scattering (SAXS) was used to quantitatively study the morphology of aligned, mono-disperse conical etched ion tracks in thin films of amorphous silicon dioxide with aspect ratios of around 6:1, and in polycarbonate foils…

Lynx is one of four large-mission concept studies for NASA's 2020 Decadal survey. The design reference mission includes an X-ray grating spectrometer (XGS) based on critical-angle transmission (CAT) gratings. In the past we studied…

Measuring the diffuse, highly-ionized baryonic content in galactic halos and the intergalactic medium through soft x-ray absorption spectroscopy of active galactic nuclei is a main scientific objective of the Lynx X-ray Observatory mission…

Scatterometry is a fast, indirect and nondestructive optical method for the quality control in the production of lithography masks. Geometry parameters of line gratings are obtained from diffracted light intensities by solving an inverse…

Future NASA X-ray spectroscopy missions will require high throughput, high resolution grating spectrometers. Off-plane reflection gratings are capable of meeting the performance requirements needed to realize the scientific goals of these…

Grazing Incidence X-ray Diffraction (GIXD) is a surface sensitive X-ray investigation technique (or geometry configuration) that can reveal the structural properties of a film deposited on a flat substrate. The term grazing indicates that…

Grazing incidence X-ray diffraction (GIXD) is widely used for the structural characterization of thin films, particularly for analyzing phase composition and the orientation distribution of crystallites. While various tools exist for…

Small angle X-ray scattering (SAXS) is extensively used in materials science as a way of examining nanostructures. The analysis of experimental SAXS data involves mapping a rather simple data format to a vast amount of structural models.…

Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a…

We report on the development of a high-resolution and highly efficient beamline for soft-X-ray resonant inelastic X-ray scattering (RIXS) located at Taiwan Photon Source. This beamline adopts an optical design that uses an active grating…

Small-angle X-ray scattering (SAXS) technique enables convenient nanoscopic characterization for various systems and conditions. Nonetheless, lab-based SAXS systems intrinsically suffer from insufficient x-ray flux and limited angular…