相关论文: Ultralow-Noise SiN Trampoline Resonators for Sensi…

Optomechanical accelerometers promise quantum-limited readout, high detection bandwidth, self-calibration, and radiation pressure stabilization. We present a simple, scalable platform that enables these benefits with nano-$g$ sensitivity at…

Two major challenges in the development of optomechanical devices are achieving a low mechanical and optical loss rate and vibration isolation from the environment. We address both issues by fabricating trampoline resonators made from low…

We explore the prospects and benefits of combining the techniques of cavity optomechanics with efforts to image spins using magnetic resonance force microscopy (MRFM). In particular, we focus on a common mechanical resonator used in cavity…

On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…

Thermal noise generally greatly exceeds quantum noise in optomechanical devices unless the mechanical frequency is very high or the thermodynamic temperature is very low. This paper addresses the design concept for a novel optomechanical…

Nanoelectromechanical (NEMS) resonators are promising uncooled thermal infrared (IR) detectors to overcome existing sensitivity limits. Here, we investigated nanoelectromechanical trampoline resonators made of silicon nitride (SiN) as…

Ponderomotive squeezing of light, where a mechanical oscillator creates quantum correlations between the phase and amplitude of the interacting light field, is a canonical signature of the quantum regime of optomechanics. At room…

The small mass and high coherence of nanomechanical resonators render them the ultimate force probe, with applications ranging from biosensing and magnetic resonance force microscopy, to quantum optomechanics. A notorious challenge in these…

Micro-electro-mechanical resonators employing a magnetic element have been proposed for magnetic field sensing applications, but the integration of magnetic materials with standard semiconductor compounds is challenging and requires complex…

All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…

We describe the use of monolithic, buckled-dome cavities as ultrasound sensors. Patterned delamination within a compressively stressed thin film stack produces high-finesse plano-concave optical resonators with sealed and empty cavity…

Optical measurement of the motion of a 940 kHz mechanical resonance of a silicon nitride nanostring resonator is demonstrated with a read out noise imprecision reaching 37 dB below that of the resonator's zero-point fluctuations. Via…

Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies.…

Mechanical resonators based on low-dimensional materials are promising for force and mass sensing experiments. The force sensitivity in these ultra-light resonators is often limited by the imprecision in the measurement of the vibrations,…

Atomic force microscopy (AFM) has been constantly supporting nanosciences and nanotechnologies for over 30 years, being present in many fields from condensed matter physics to biology. It enables measuring very weak forces at the nanoscale,…

Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…

We studied noise properties of microwave signals transmitted through the cryogenic resonator. The experiments were performed with the 11.342 GHz sapphire loaded cavity resonator cooled to 6.2 K. Based on the measured transmission…

We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…

We present the design, fabrication and initial characterization of a paddle nanocavity consisting of a suspended sub-picogram nanomechanical resonator optomechanically coupled to a photonic crystal nanocavity. The optical and mechanical…

We present a "nanoladder" geometry that minimizes the mechanical dissipation of ultrasensitive cantilevers. A nanoladder cantilever consists of a lithographically patterned scaffold of rails and rungs with feature size $\sim$ 100 nm.…