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We describe the application of nanoelectromechanical systems (NEMS) to ultrasensitive mass detection. In these experiments, a modulated flux of atoms was adsorbed upon the surface of a 32.8 MHz NEMS resonator within an ultrahigh vacuum…

其他凝聚态物理 · 物理学 2009-11-10 K. L. Ekinci , X. M. H. Huang , M. L. Roukes

We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for…

Nanoelectromechanical systems (NEMS) have generated considerable interest as inertial mass sensors. NEMS resonators have been used to weigh cells, biomolecules, and gas molecules, creating many new possibilities for biological and chemical…

介观与纳米尺度物理 · 物理学 2012-04-13 J. Chaste , A. Eichler , J. Moser , G. Ceballos , R. Rurali , A. Bachtold

Nanoelectromechanical Systems (NEMS) have emerged as a promising technology for performing the mass spectrometry of large biomolecules and nanoparticles. As nanoscale objects land on NEMS sensor one by one, they induce resolvable shifts in…

介观与纳米尺度物理 · 物理学 2019-07-24 Mert Yuksel , Ezgi Orhan , Cenk Yanik , Atakan B. Ari , Alper Demir , M. Selim Hanay

Nanoelectromechanical systems (NEMs) hold promise for a number of scientific and technological applications. In particular, NEMs oscillators have been proposed for use in ultrasensitive mass detection, radio-frequency signal processing, and…

介观与纳米尺度物理 · 物理学 2007-05-23 Vera Sazonova , Yuval Yaish , Hande Ustunel , David Roundy , Tomas A. Arias , Paul L. McEuen

Nanomechanical sensors based on detecting and tracking resonance frequency shifts are to be used in many applications. Various open- and closed-loop tracking schemes, all offering a trade-off between speed and precision, have been studied…

信号处理 · 电气工程与系统科学 2023-09-22 Hajrudin Bešić , Alper Demir , Veljko Vukićević , Johannes Steurer , Silvan Schmid

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…

应用物理 · 物理学 2023-03-22 Daehun Lee , Shahin Jahanbani , Jack Kramer , Ruochen Lu , Keji Lai

Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…

仪器与探测器 · 物理学 2023-12-19 Abhay K. Rajak , Ritambhara Dash , Ashwini Kumari , A. S. Bhattacharyya

We report the observation of self-oscillations in a bottom-up nanoelectromechanical system (NEMS) during field emission driven by a constant applied voltage. An electromechanical model is explored that explains the phenomenon and that can…

This paper shows the effect of scaling silicon accelerometers down from MEMS to NEMS. It models both electronics and Brownian noise sources for both capacitive and resonant devices, and computes the minimum detectable signal attainable.…

仪器与探测器 · 物理学 2012-05-23 Sébastien Hentz , Laurent Duraffourg , Eric Colinet

Recently, there have been dramatic advances in the miniaturization of electromechanical devices. Most of the micro- and nanoelectromechanical systems (MEMS-NEMS) operate in the resonant modes1. The micron-, and, the more, the…

强关联电子 · 物理学 2007-08-21 V. Ya. Pokrovskii , S. G. Zybtsev

Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of…

介观与纳米尺度物理 · 物理学 2015-06-25 M. P. Blencowe

We generalize a proposal for detecting single phonon transitions in a single nanoelectromechanical system (NEMS) to include the intrinsic anharmonicity of each mechanical oscillator. In this scheme two NEMS oscillators are coupled via a…

量子物理 · 物理学 2009-11-10 D. H. Santamore , Hsi-Sheng Goan , G. J. Milburn , M. L. Roukes

Mechanical resonators are widely used as inertial balances to detect small quantities of adsorbed mass through shifts in oscillation frequency[1]. Advances in lithography and materials synthesis have enabled the fabrication of nanoscale…

材料科学 · 物理学 2015-05-13 K. Jensen , Kwanpyo Kim , A. Zettl

Nanomechanical resonators having small mass, high resonance frequency and low damping rate are widely employed as mass detectors. We study the performances of such a detector when the resonator is driven into a region of nonlinear…

量子物理 · 物理学 2009-11-13 Eyal Buks , Bernard Yurke

Self-sustained oscillators are ubiquitous and essential for metrology, communications, time reference, and geolocation. In its most basic form an oscillator consists of a resonator driven on-resonance, through feedback, to create a periodic…

介观与纳米尺度物理 · 物理学 2013-05-21 L. G. Villanueva , E. Kenig , R. B. Karabalin , M. H. Matheny , R. Lifshitz , M. C. Cross , M. L. Roukes

Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 1,000 - 100,000. The minuscule active masses of these devices, in conjunction with their…

仪器与探测器 · 物理学 2009-11-10 K. L. Ekinci , Y. T. Yang , M. L. Roukes

Nano electromechanical systems are considered as ultra sensitive devices for mass and force detection. Capacitive actuation is widely used in these devices but is known to degrade the quality factor of the resonator due to DC electrostatic…

介观与纳米尺度物理 · 物理学 2016-07-27 T Barois , S Perisanu , P Poncharal , Philippe Vincent , A Ayari

This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…

仪器与探测器 · 物理学 2021-12-21 Vinayak Pachkawade , Zion Tse

Nanomechanical resonators are widely operated as force and mass sensors with sensitivities in the zepto-Newton and yocto-gram regime, respectively. Their accuracy, however, is usually undermined by high uncertainties in the effective mass…

仪器与探测器 · 物理学 2019-10-23 Francesco Ricci , Marc T. Cuairan , Gerard P. Conangla , Andreas W. Schell , Romain Quidant
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