用扫描近场微波显微镜定量成像薄层电阻
材料科学
2009-10-30 v1 超导电性
摘要
我们描述了通过监测谐振扫描近场微波显微镜中的频移和品质因数来定量成像金属薄膜薄层电阻的方法。该技术允许在0.1至50 GHz的频率范围内以每像素约10毫秒的速度快速获取图像。在当前配置下，系统可以分辨100欧姆/平方薄膜中小至0.6欧姆/平方的薄层电阻变化。我们通过在7.5 GHz下对5厘米直径蓝宝石晶圆上的YBa2Cu3O7（YBCO）薄膜生成定量薄层电阻图像来演示其应用。
引用
@article{arxiv.cond-mat/9712171,
title = {Quantitative Imaging of Sheet Resistance with a Scanning Near-Field Microwave Microscope},
author = {D. E. Steinhauer and C. P. Vlahacos and S. K. Dutta and B. J. Feenstra and F. C. Wellstood and Steven M. Anlage},
journal= {arXiv preprint arXiv:cond-mat/9712171},
year = {2009}
}
备注
6 pages, 3 figures; To be published in Appl. Phys. Lett. (2/16/98); See also Steinhauer et al., Appl. Phys. Lett., vol. 71, p. 1736 (1997) cond-mat/9712142; See also http://www.csr.umd.edu/research/hifreq/micr_microscopy.html