低压强高负电性等离子体的放电结构层级与准冷离子近似
等离子体物理
2025-09-08 v1
摘要
本文在室温量级下的准冷离子近似下，通过流体模拟研究了低压强下 Ar 和 SF6 感应耦合等离子体的放电结构。
引用
@article{arxiv.2509.04728,
title = {Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation},
author = {Rui-Ji Tang and Shu-Xia Zhao and Yu Tian},
journal= {arXiv preprint arXiv:2509.04728},
year = {2025}
}
备注
arXiv admin note: substantial text overlap with arXiv:2502.16452