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This paper presents progress towards the large-scale manufacturability of piezo- and ferroelectric Al$_{1-x}$Sc$_x$N thin films with very high Sc content. Al$_{0.6}$Sc$_{0.4}$N layers were deposited by reactive sputtering from a 300 mm…

Atomic layer deposition was used to synthesize niobium silicide (NbSi) films with a 1:1 stoichiometry, using NbF5 and Si2H6 as precursors. The growth mechanism at 200oC was examined by in-situ quartz crystal microbalance (QCM) and…

We report a novel method for depositing patterned dielectric layers with sub-micron features using atomic layer deposition (ALD). The patterned films are superior to sputtered or evaporated films in continuity, smoothness, conformality, and…

Mesoscale and Nanoscale Physics · Physics 2009-11-10 M. J. Biercuk , D. J. Monsma , C. M. Marcus , J. S. Becker , R. G. Gordon

The dielectric properties of NiO thin films grown by pulsed laser deposition have been studied as a function of strain at temperature from 10 to 300 K. Above 150 K, the contribution of space-charge polarization to the dielectric…

Materials Science · Physics 2019-06-04 Alireza Kashir , Hyeon-Woo Jeong , Gil-ho Lee , Pavlo Mikheenko , Yoon Hee Jeong

MgB2 thick film was synthesized on the stainless steel substrate by the technique of hybrid physical-chemical vapor deposition (HPCVD), using Mg ingot and B2H6 as the raw materials. The film thickness is about 10 microns. The scanning…

Superconductivity · Physics 2015-06-24 Qing-rong Feng , Chinping Chen , Ying Lu , Zhang Zia , Jing-pu Guo , Xiao-nan Wang , Meng Zhu , Jun Xu , Yong-zhong Wang

Lowering the operating temperature of Solid Oxide Fuel Cells (SOFCs) is essential for improving durability and enabling large scale commercialization. Mixed ionic-electronic conductors (MIECs) of the Ruddlesden-Popper family, such as…

We fabricated NiFe2O thin films on MgAl2O4 (001) substrates by reactive dc magnetron co-sputtering in a pure oxygen atmosphere at different substrate temperatures. The film properties were investigated by various techniques with a focus on…

Compositionally graded Fe-Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe on which a piece of Pt is asymmetrically positioned. Energy Dispersive X-Ray analysis was used to map the…

Spin gapless semiconductors are interesting novel class of materials by embracing both magnetism and semiconducting. Its potential application in future spintronics requires realization in thin film form. In this letter, we report a…

Materials Science · Physics 2019-08-17 G. Z. Xu , Y. Du , X. M. Zhang , H. G. Zhang , E. K. Liu , W. H. Wang , G. H. Wu

The effect of vacuum annealing thin films of the compensated ferrimagnetic half-metal Mn2RuxGa at temperatures from 250 to 400 degree Celsius is investigated. The 39.3 nm films deposited on (100) MgO substrates exhibit perpendicular…

Materials Science · Physics 2019-04-04 K. E. Siewierska , G. Atcheson , K. Borisov , M. Venkatesan , K. Rode , J. M. D. Coey

Epitaxially grown full Heusler alloy of Rh2MnSb thin films were prepared for the first time using DC magnetron sputtering. The films were deposited on MgO [001] substrates with a deposition temperature of 600{\deg}C, 700{\deg}C, and…

Thermoelectric (TE) materials achieve localised conversion between thermal and electric energies, and the conversion efficiency is determined by a figure of merit zT. Up to date, two-dimensional electron gas (2DEG) related TE materials hold…

This paper reports on the deposition of amorphous and crystalline thin films of Ga2O3 by reactive pulsed direct current magnetron sputtering from a liquid gallium target onto fused (f-) quartz and c plane (c-) sapphire substrates, where the…

Single-phased, single-oriented thin films of Mn-doped ZnAs-based diluted magnetic semiconductor (DMS) Ba1-xKx(Zn1-yMny)2As2 (x = 0.03, 0.08; y = 0.15) have been deposited on Si, SrTiO3, LaAlO3, (La,Sr)(Al,Ta)O3, and MgAl2O4 substrates,…

We investigate the exchange stiffness constants of 28-nm-thick CoFeB film using Brillouin light scattering. Series of CoFeB films are prepared on the MgO(001) substrate with or without additional 5-nm thick MgO buffer layer, the effect of…

Materials Science · Physics 2015-12-09 Jaehun Cho , Jinyong Jung , Shin-Yong Cho , Chun-Yeol You

We use room temperature ion beam assisted sputtering (IBAS) to deposit niobium nitride thin films. Electrical and structural characterizations were performed by electric transport and magnetization measurements at variable temperatures,…

Single-phase Ni0.46Mn0.54As films with strained C1b symmetry have been successfully grown on GaAs (001) substrates by molecular-beam epitaxy. The epitaxial relationship between the film and the substrate has been studied using synchrotron…

Materials Science · Physics 2019-01-30 J. L. Ma , H. L. Wang , X. M. Zhang , S. Yan , W. S. Yan , J. H. Zhao

We have fabricated high-quality FeSe1-x superconducting films with a bulk Tc of 11-12 K on different substrates, Al2O3(0001), SrTiO3(100), MgO(100), and LaAlO3(100), by using a pulsed laser deposition technique. All the films were grown at…

Superconductivity · Physics 2015-05-18 Soon-Gil Jung , Nam Hoon Lee , Eun-Mi Choi , Won Nam Kang , Sung-Ik Lee , Tae-Jong Hwang , Dong Ho Kim

There is renewed interest in rare-earth elements and gadolinium in particular for a range of studies in coupling physics and applications. However, it is still apparent that synthesis impacts understanding of the intrinsic magnetic…

Materials Science · Physics 2012-10-09 G. Scheunert , W. R. Hendren , C. Ward , R. M. Bowman

Inertial magnetization dynamics have been predicted at ultrahigh speeds, or frequencies approaching the energy relaxation scale of electrons, in ferromagnetic metals. Here we identify inertial terms to magnetization dynamics in thin…

Materials Science · Physics 2016-01-26 Yi Li , Anne-Laure Barra , Stephane Auffret , Ursula Ebels , William E. Bailey