Compositionally graded Fe-Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe on which a piece of Pt is asymmetrically positioned. Energy Dispersive X-Ray analysis was used to map the variation in film composition across the substrate, as a function of the size of the Pt piece. A scanning polar Magneto-Optical-Kerr-Effect system was used to probe the influence of composition and post-deposition annealing conditions (temperature and time) on coercivity. In this way the maximum coercivity achievable for the sputtering system used could be established in a high throughput fashion. The evolution in coercivity with composition was correlated with the formation of L10 FePt and changes in its lattice parameters, as determined by scanning X-ray diffraction. High throughput coercivity mapping was then carried out on homogeneous Fe-Pt thin films of different composition treated to different annealing conditions. This study serves as a step towards the integration of coercive FePt films into collectively fabricated devices.
@article{arxiv.2111.00366,
title = {A High Throughput Study of both Compositionally Graded and Homogeneous Fe-Pt Thin Films},
author = {Yuan Hong and Isabelle de Moraes and Gabriel Gomez Eslava and Stephane Grenier and Edith Bellet-Amalric and Andre Dias and Marlio Bonfim and Laurent Ranno and Thibaut Devillers and Nora M. Dempsey},
journal= {arXiv preprint arXiv:2111.00366},
year = {2021}
}