Preparation of Cobalt Thin Films by Sputtering Systems and Its Magnetic Characterization

Mustafa Erkovan

Preparation of Cobalt Thin Films by Sputtering Systems and Its Magnetic Characterization

Materials Science 2009-10-29 v1

Authors: Mustafa Erkovan

Abstract

Different thicknesses of cobalt thin films were growth by magnetron sputtering deposition techniques. The films thicknesses were determinated with X ray Photoelectron Spectroscopy (XPS) and Quartz Crystal Monitoring (QCM). XPS is also used to determinate the films quality. The films magnetic properties were determinated by Ferromagnetic Resonance (FMR) technique.

Keywords

cobalt thin films magnetron sputtering X-ray photoelectron spectroscopy quartz crystal monitoring ferromagnetic resonance magnetic characterization

Cite

@article{arxiv.0910.5452,
  title  = {Preparation of Cobalt Thin Films by Sputtering Systems and Its Magnetic Characterization},
  author = {Mustafa Erkovan},
  journal= {arXiv preprint arXiv:0910.5452},
  year   = {2009}
}

Comments

14 pages, 6 figures

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