Thin Film growth of Solid State materials

A. S Bhattacharyya; P. Prabhakar; R. P. Kumar; S. Sharma; S. K. Raj; R. Ratn; P. Kommu

Thin Film growth of Solid State materials

Materials Science 2016-11-24 v1

Authors: A. S Bhattacharyya , P. Prabhakar , R. P. Kumar , S. Sharma , S. K. Raj , R. Ratn , P. Kommu

Abstract

Magnetron sputtering has also been used to deposit thin films of some materials and it has significant technological importance. A modeling on deposition of epitaxial thin films of Yttrium Stabilized Zirconia (YSZ) was done the diffusion of adatom on the surface were studies. There exists a strong interaction of ions formed in the plasma during the sputtering process. Cu thin films were deposited on Si. Nanocomposite thin film of SiCN showed dendritic growth.

Keywords

thin film physics thin film magnetism thin films

Cite

@article{arxiv.1611.07926,
  title  = {Thin Film growth of Solid State materials},
  author = {A. S Bhattacharyya and P. Prabhakar and R. P. Kumar and S. Sharma and S. K. Raj and R. Ratn and P. Kommu},
  journal= {arXiv preprint arXiv:1611.07926},
  year   = {2016}
}

Comments

6 Pages; 8 figures in Materials Science : Materials Reviews, 2016

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