Related papers: Phase mask fabrication for multi-plane light conve…
We present results of a planar process development based on the combination of electron-beam lithography and dry etching for fabricating high-quality superconducting photosensitive structures in the sub-100nm regime. The devices were…
Integrated photonic chips have significant potential in telecommunications, classic computing, quantum systems, and topological photonics. Direct laser writing offers unique capability for creating three-dimensional photonic devices in an…
Conventional projection Talbot lithography usually employs opaque (amplitude) or transparent (phase) masks for creating a periodic array of Fresnel diffraction fringes in the photosensitive substrate. For particular mask design the…
Layout fracturing is a fundamental step in mask data preparation and e-beam lithography (EBL) writing. To increase EBL throughput, recently a new L-shape writing strategy is proposed, which calls for new L-shape fracturing, versus the…
We report the fabrication of large-area phase masks on thin fused-silica substrates that are suitable for shaping multi-terawatt femtosecond laser beams. We apply these phase masks for the generation of intense femtosecond optical vortices.…
Colloidal lithography [1] is how patterns are reproduced in a variety of natural systems and is used more and more as an efficient fabrication tool in bio-, opto-, and nano-technology. Nanoparticles in the colloid are made to form a mask on…
We have developed a lithography-free, all-dry process for fabricating graphene devices using an ultrathin quartz filament as a shadow mask to avoid possible contamination of graphene during lithographic process. This technique was used to…
Colloidal lithography has emerged as a promising alternative to conventional nanofabrication techniques, offering the ability to create nanoscale patterns in a cost-effective and scalable manner. However, it has been so far limited by…
Direct laser writing method is a promising technique for the large-scale and cost-effective fabrication of periodic nanostructure arrays exciting hybrid lattice plasmons. This type of electromagnetic mode manifests a narrow and deep…
Photolithography assisted chemo-mechanical etching (PLACE), a technique specifically developed for fabricating highquality large-scale photonic integrated circuits (PICs) on thin-film lithium niobate (TFLN), has enabled fabrication of a…
We report on the fabrication of metasurface phase plates consisting of gold nanoantenna arrays that generate Laguerre-Gaussian modes from a circularly polarized Gaussian input beam. The corresponding helical phase profiles with radial…
High-resolution lithographic techniques are often limited by low volumetric throughput, since there is no universal and scalable manufacturing process that can produce 3D metasurfaces. In this work, we demonstrate a high-speed holographic…
We present a method to combine two periodic lattice wave-fields to generate a complex dual lattice wave-field which could be employed for microfabrication of corresponding 2D dual lattice structures. Since the addition of two periodic…
Large surface area applications such as high-efficiency > 26% solar cells require surface patterning with 1-10 micrometers periodic patterns at high fidelity over 1-10 cm^2 areas (before up scaling to 1 m^2) to perform at, or exceed, the…
Lensless cameras provide a framework to build thin imaging systems by replacing the lens in a conventional camera with an amplitude or phase mask near the sensor. Existing methods for lensless imaging can recover the depth and intensity of…
We propose single-step additive fabrication of graded-index optical elements by introducing the light exposure as the additional dimension to three-dimensional (3D) laser writing, hence (3+1)D writing. We use a commercial printer and…
Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this…
Across the fields of magnetism, microelectronics, optics, and others, engineered local variations in physical properties can yield groundbreaking functionalities that play a crucial role in enabling future technologies. Beyond binary…
Wrapping a computation domain with a perfectly matched layer (PML) is one of the most effective methods of imitating/approximating the radiation boundary condition in Maxwell and wave equation solvers. Many PML implementations often use a…
Resonant cavity LEDs (RCLEDs) exhibit excellent temporal and spatial coherence with narrow spectral linewidth and small divergence angle, which is of great importance for micro-displays. In this paper, we demonstrate a novel method to…