Related papers: Subnanometer Accuracy of Surface Characterization …
When a coherent quasi-monochromatic light is reflected from a step, a diffraction pattern is formed that can be described by Fresnel-Kirchhoff integral and visibility of the fringes depends on the height of the step. In this paper, it is…
We characterize nano-textured surfaces by optical diffraction techniques using an adapted commercial light microscope with two detectors, a CCD camera and a spectrometer. The acquisition and analyzing time for the topological parameters…
We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam s spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly-tailored spatial…
Digital holography (DH) is a powerful tool for surface profilometry of objects with sub-wavelength precision. In this article, we demonstrate full-cascade-linked synthetic-wavelength DH (FCL-SW-DH) for nanometer-precision surface metrology…
One-shot full-field surface profilometry using digital diffractive-confocal imaging correlation microscope based on digital micromirror device is developed for one-shot microscopic 3D surface measurement. Optical configuration applies…
We present an optical metrology system for characterization of topography of micro/nano-structures on a surface or embedded in a semi-transparent material. Based on the principles of scatterometry, where the intensity of scattered light is…
Diffraction of light beams from the phase steps due to the abrupt changes in the boundary of step leads to Fresnel fringes that their visibility and intensity profile depend on the change of the step height or light incident angle. The…
Optical spectroscopy techniques such as differential reflectance and transmittance have proven to be very powerful techniques to study 2D materials. However, a thorough description of the experimental setups needed to carry out these…
The structural complexity and instability of many interference phase microscopy methods are the major obstacles toward high-precision phase measurement. In this vein, improving more efficient configurations as well as proposing new methods…
A microscope based on the Linnik interferometer was designed, built, and tested. Two methods were used for interference pattern measurement: phase-shifting and polarized single-shot methods. The former uses a low coherence light emitting…
We report that flat substrates such as glass coverslips with surface roughness well below 0.5 nm feature notable speckle patterns when observed with high-sensitivity interference microscopy. We uncover that these speckle patterns…
Far-field characterization of small objects is severely constrained by the diffraction limit. Existing tools achieving sub-diffraction resolution often utilize point-by-point image reconstruction via scanning or labelling. Here, we present…
There has been a significant effort to design nanophotonic structures that process images at the speed of light. A prototypical example is in edge detection, where photonic-crystal-, metasurface-, and plasmon-based designs have been…
The optical elements comprised of sub-diffractive light scatterers, or metasurfaces, hold a promise to reduce the footprint and unfold new functionalities of optical devices. A particular interest is focused on metasurfaces for manipulation…
Detecting anomalies from 3D point clouds has received increasing attention in the field of computer vision, with some group-based or point-based methods achieving impressive results in recent years. However, learning accurate point-wise…
A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve.…
We present an analytical description and an experimental realization of interscale mixing microscopy, a diffraction-based imaging technique that is capable of detecting wavelength/10 objects in far-field measurements with both coherent and…
Images are the standard input for vision algorithms, but one-shot infield reflectance measurements are creating new opportunities for recognition and scene understanding. In this work, we address the question of what reflectance can reveal…
When subjected to monochromatic incident light a nanoparticle will emit light which then interferes with the incident beam. With sufficient contrast and sufficiently close to the particle this interference pattern may be recorded with a…
Artificial nanostructures with ultrafine and deep-subwavelength feature sizes have emerged as a paradigm-shifting platform to advanced light field management, becoming a key building block for high-performance integrated optoelectronics and…