Nanolayer thickness detection via spatial mode projection
Optics
2013-10-11 v3
Abstract
We demonstrate an optical scheme for measuring the thickness of thin nanolayers with the use of light beam s spatial modes. The novelty in our scheme is the projection of the beam reflected by the sample onto a properly-tailored spatial mode. In the experiment described below, we are able to measure a step height smaller than 10 nm, i.e., one-eightieth (1/80)of the wavelength with a standard error in the picometer scale. Since our scheme enhances the signal-to-noise ratio (SNR), which effectively increases the sensitivity of detection, the extension of this technique to the detection of subnanometric layer thicknesses is feasible.
Cite
@article{arxiv.1306.0776,
title = {Nanolayer thickness detection via spatial mode projection},
author = {N. Hermosa and C. Rosales-Guzmán and S. F. Pereira and J. P. Torres},
journal= {arXiv preprint arXiv:1306.0776},
year = {2013}
}
Comments
experimental results are added