Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy
Optics
2019-04-24 v2 Applied Physics
Abstract
A novel full-field surface profilometer using diffractive-based chromatic confocal microscopy and area-scan spectral sensing is developed. A normalized cross correlation algorithm was developed to establish a spectrum-depth response curve. A measuring repeatability for a single surface depth can be controlled within 120 nanometers.
Cite
@article{arxiv.1812.06578,
title = {Development of novel one-shot full-field surface profilometer using chromatic confocal microscopy},
author = {Duc Trung Nguyen and Liang-Chia Chen},
journal= {arXiv preprint arXiv:1812.06578},
year = {2019}
}
Comments
Conflict of interest between co-authors