Single-exposure profilometry using partitioned aperture wavefront imaging
Optics
2015-06-01 v1
Abstract
We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a standard lamp-based reflection microscope. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and sub-micron lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.
Cite
@article{arxiv.1307.5267,
title = {Single-exposure profilometry using partitioned aperture wavefront imaging},
author = {Roman Barankov and Jerome Mertz},
journal= {arXiv preprint arXiv:1307.5267},
year = {2015}
}
Comments
4 pages