Related papers: Numerical Modeling of MEMS Resonators

Resonant scattering of electromagnetic (EM) waves by small particles is considered as one of the basic problem in metamaterial science. At present, special subwavelength resonators are considered as structural elements in chiral and…

Reconfigurable electromagnetic structures (REMSs), such as reconfigurable reflectarrays (RRAs) or reconfigurable intelligent surfaces (RISs), hold significant potential to improve the spectral efficiency of wireless communication systems…

This paper is devoted to the analysis of resonant MEMS sensors based on discrete relay feedback techniques. One drawback of such techniques is that some synchronization usually occurs between the discrete part and the continuous part of the…

Incorporating functional molecules into sensor devices is an emerging field in molecular electronics that aims at exploiting the sensitivity of different molecules to their environment and turning it into an electrical signal. Among the…

Mechanical nonlinearities dominate the motion of nanoresonators already at relatively small oscillation amplitudes. Although single and coupled two-degrees-of-freedom models have been used to account for experimentally observed nonlinear…

As optical telecommunication networks become more complex, there is an emerging need for systems capable of very complex switching and manipulation of large numbers of optical signals. MEMS enable these systems by combining excellent…

Resonant metasurfaces are devices composed of nanostructured sub-wavelength scatterers that generate narrow optical resonances, enabling applications in filtering, nonlinear optics, and molecular fingerprinting. It is highly desirable for…

This work presents the mathematical modeling and numerical investigation of a thermo-controlled Micro-Electro-Mechanical System (MEMS) obtained by coupling an HP memristor with mechanical and electrical resonators. Using the linear drift HP…

A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in high frequency, low sensitivity, poor reliability, and poor…

A simple and fast process for micro-electromechanical (MEM) resonators with deep sub-micron transduction gaps in thin SOI is presented in this paper. Thin SOI wafers are important for advanced CMOS technology and thus are evaluated as…

Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…

Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…

A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its…

We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional…

Ferromagnetic resonators with short-wavelength, so-called magnetostatic (MS), oscillations can be considered in microwaves as point (with respect to the external electromagnetic fields) particles. It was shown recently [E. O. Kamenetskii,…

Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability…

This paper is devoted to the unidimensional analysis of a 2-ports silicon resonator vibrating in thickness--extensional mode. Both excitation and detection ports are capacitive transducers used to control the system of longitudinal elastic…

Micro- and nanoelectromechanical system (MEMS and NEMS) resonators can exhibit rich nonlinear dynamics as they are often operated at large amplitudes with high quality factors and possess a high mode density with a variety of nonlinear…