One-dimensional Modelling of Electrostatic Generation and Detection of Bulk Acoustic Waves in layered structures
Instrumentation and Detectors
2016-12-21 v1 Mesoscale and Nanoscale Physics
Abstract
This paper is devoted to the unidimensional analysis of a 2-ports silicon resonator vibrating in thickness--extensional mode. Both excitation and detection ports are capacitive transducers used to control the system of longitudinal elastic waves established along the thickness of a layered structure. The analysis consists of integrating the capacitive transduction of longitudinal elastic waves within a specific implementation of the general scheme of impedance methods largely used as standard tools for the modelling of RF-MEMS.
Keywords
Cite
@article{arxiv.1612.06641,
title = {One-dimensional Modelling of Electrostatic Generation and Detection of Bulk Acoustic Waves in layered structures},
author = {Lilia Arapan and Mihaela Ivan and Bernard Dulmet},
journal= {arXiv preprint arXiv:1612.06641},
year = {2016}
}