English

Phononic graded meta-MEMS for elastic wave amplification and filtering

Applied Physics 2023-06-22 v1

Abstract

Inspired by recent graded metamaterials designs, we create phononic arrays of micro-resonators for frequency signal amplification and wave filtering. Leveraging suspended waveguides on a thick silicon substrate, we hybridize surface Rayleigh and Lamb flexural waves to effectively achieve phononic signal control along predefined channels. The guided waves are then spatially controlled using a suitable grading of the micro-resonators, which provide high signal-to-noise ratio and simultaneously create phononic delay-lines. The proposed device can be used for sensing, wave filtering or energy harvesting.

Keywords

Cite

@article{arxiv.2306.12076,
  title  = {Phononic graded meta-MEMS for elastic wave amplification and filtering},
  author = {Federico Maspero and Jacopo Maria De Ponti and Luca Iorio and Annachiara Esposito and Riccardo Bertacco and Andrea di Matteo and Alberto Corigliano and Raffaele Ardito},
  journal= {arXiv preprint arXiv:2306.12076},
  year   = {2023}
}