On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency
Applied Physics
2018-05-21 v3
Abstract
The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in high frequency, low sensitivity, poor reliability, and poor integrability. We show a universal on-chip transduction scheme, which can be adapted to any MEMS/NEMS resonator. We achieve all electrical, on-chip MEMS/NEMS for any resonator.
Cite
@article{arxiv.1712.02918,
title = {On-chip self-sensing enhancing actuation for MEMS/NEMS with large efficiency},
author = {Meiyong Liao and Liwen Sang and Tokuyuki Teraji and Satoshi Koizumi and Yasuo Koide},
journal= {arXiv preprint arXiv:1712.02918},
year = {2018}
}
Comments
Some language is not well qualified as a scientific paper. In order not to lead misunderstanding, we would like to withdraw this paper