We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional mode are studied, whereby 1:2, 1:3, and 2:1 internal resonances occur. Even and odd modes are induced to couple by breaking the longitudinal symmetry of the structure. Self-oscillations are induced in the second flexural mode via a gain-feedback loop, thereafter its frequency is pulled into a commensurate frequency ratio with the other modes, enabling the oscillator to act as a driver/pump for four modes simultaneously. Thus, by leveraging multiple internal resonances, a five modes frequency-locked comb is generated.
@article{arxiv.1908.02418,
title = {Multimode internal resonances in a MEMS self-sustained oscillator},
author = {S. Houri and D. Hatanaka and M. Asano and H. Yamaguchi},
journal= {arXiv preprint arXiv:1908.02418},
year = {2020}
}