Related papers: Numerical Modeling of MEMS Resonators
This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando…
Microelectromechanical systems (MEMS) speakers are compact, scalable alternatives to traditional voice coil speakers, promising improved sound quality through precise semiconductor manufacturing. This review provides an overview of the…
This research is on the dynamics of electrostatically actuated radial-contour mode microring resonators. The governing equation of motion is derived by the minimization of the Hamiltonian and generalized to include the viscous damping…
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors.…
Tuning the frequency of a resonant element is of vital importance in both the macroscopic world, such as when tuning a musical instrument, as well as at the nanoscale. In particular, precisely controlling the resonance frequency of isolated…
Microelectromechanical systems (MEMS) gyroscopes are widely used in consumer and automotive applications. They have to fulfill a vast number of product requirements which lead to complex mechanical designs of the resonating structure.…
A vectorial analysis of magnetic resonance spectrometers, based on traveling wave resonators and including the reference arm and the automatic control of frequency, has been developed. The proposed model, valid also for stationary wave…
Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…
The dynamics of nanomechanical resonators driven by both low- and high-frequency signals is studied. Considering, as an example, resonators made of a doubly-clamped beam with magnetomotive driving, it is shown that three-frequency…
In the past fifteen years mathematical models for microelectromechanical systems (MEMS) have been the subject of several studies, in particular due to the interesting qualitative properties they feature. Still most research is devoted to an…
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…
This paper reports the first demonstration of a magnet-free, high performance microelectromechanical system (MEMS) based circulator. An innovative circuit based on the commutation of MEMS resonators with high quality (Q) factor using RF…
Resonant modes determine the response of electromagnetic devices, including dielectric and plasmonic resonators. Relying on the degrees of freedom that metamaterials provide, this contribution shows how to design, at will, the resonant…
Methods on reducing resonant frequencies and electrical sizes of resonators are reported in this paper. Theoreti-cal and numerical analysis has been used and the results for the broadside-coupled resonators from both studies exhibit good…
Recently the strong demands in wireless communication requires expanding development for the application of RF MEMS (Radio Frequency micro electro mechanical systems) sensing devices such as micro-switches, tunable capacitors because it…
Resonant electromagnetic actuators have been broadly used as vibration motors for mobile devices given their ability of generating relatively fast, strong, and controllable vibration force at a given resonant frequency. Mechanism of the…