Related papers: Numerical Modeling of MEMS Resonators
Mechanical resonators are widely used as precision clocks and sensitive detectors that rely on the stability of their eigenfrequencies. The phase noise is determined by different factors ranging from thermal noise and frequency noise of the…
The study of collective nonlinear dynamics of coupled mechanical resonators is regaining attention in recent years thanks to rapid developments in the fields of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). We…
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the order of tens or hundreds of microns. Electrostatic forces play…
This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…
We studied the dynamical response of a nanomechanical resonator to biomolecular (e.g. DNA) adsorptions on a resonator's surface by using a theoretical model, which considers the Hamiltonian H such that the potential energy consists of…
Micro- and nano-electromechanical resonators are a fundamental building block of modern technology, used in environmental monitoring, robotics, medical tools as well as fundamental science. These devices rely on dedicated electronics to…
Recent advances in glass fabrication technology have allowed for the development of high-precision inertial sensors in devices weighing in the order of grams. Gram-scale inertial sensors can be used in many applications with tight space or…
We investigate numerically and experimentally dynamical systems having three interacting frequencies: a discrete mapping (a circle map), an exactly solvable model (a system of coupled ordinary differential equations), and an experimental…
The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electro-mechanical systems (MEMS…
Magneto-mechanical resonators (MMRs) represent a recently proposed type of passive sensor that enables the estimation of its pose as well as sensing other parameters in its environment. The working principle of MMRs entails an excitation of…
Nanoelectromechanical systems (NEMS) are devices integrating electrical and mechanical functionality on the nanoscale. Because of individual electron tunneling, such systems can show rich self-induced, highly non-linear dynamics. We show…
Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only…
Microelectromechanical (MEMS) resonators are widely used in timekeeping applications, and recent advances in fabrication, materials, and encapsulation technology have advanced their potential as high stability frequency references. However,…
Circular microresonators (microdisks) are micron sized dielectric disks embedded in a material of lower refractive index. They possess modes with complex eigenvalues (resonances) which are solutions of analytically given transcendental…
The need for wearable or abandoned microsystems, as well as the trend to a lower power consumption of electronic devices, make miniaturized renewable energy generators a viable alternative to batteries. Among the different alternatives, an…
In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched…
Nanomechanical resonators, machined out of Silicon-on-Insulator wafers, are operated in the nonlinear regime to investigate higher-order mechanical mixing at radio frequencies, relevant to signal processing and nonlinear dynamics on…
Nanoelectromechanical systems (NEMS) have generated considerable interest as inertial mass sensors. NEMS resonators have been used to weigh cells, biomolecules, and gas molecules, creating many new possibilities for biological and chemical…
Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing…
A simple theoretical model which provides circuit parameters and resonance frequency of metallic thick resonators is presented. Two different topologies were studied: the original Pendry's SRR and spiral resonators of two and three turns.…